2022
DOI: 10.1016/j.ceramint.2022.01.354
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Feasibility of manufacturing of Al2O3–Mo HTCC by hybrid additive process

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Cited by 8 publications
(6 citation statements)
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“…According to equation (4), the transmission rate of electromagnetic wave in Al 2 O 3 was 9.56 × 10 7 m/s. In addition, the relative permittivity and relative permeability of Al 2 O 3 applied was 9.8 and 1 in this SiP device, respectively (Bernard et al , 2022). Then the theoretical transmission rate of electromagnetic wave was 9.57 × 10 7 m/s according to equation (3).…”
Section: Resultsmentioning
confidence: 97%
“…According to equation (4), the transmission rate of electromagnetic wave in Al 2 O 3 was 9.56 × 10 7 m/s. In addition, the relative permittivity and relative permeability of Al 2 O 3 applied was 9.8 and 1 in this SiP device, respectively (Bernard et al , 2022). Then the theoretical transmission rate of electromagnetic wave was 9.57 × 10 7 m/s according to equation (3).…”
Section: Resultsmentioning
confidence: 97%
“…The possibility of generating enclosed areas increased. The solidification of the remaining Sn-rich liquid caused shrinkage in the final state due to differences in the thermal expansion coefficients (10.05 × 10 −6 • C −1 for tin dioxide [34] and 7.1 × 10 −6 • C −1 for Alumina [35]). Therefore, shrinkage pores and poor interfaces were generated.…”
Section: Pores and Other Cast Defects Caused By Snmentioning
confidence: 99%
“…Multilayer ceramic substrates are mainly manufactured by HTCC or LTCC technology, which was originally derived from developments at RCA Corporation in the late 1950s [ 230 ]. To meet specific requirements, such as geometric complexity, microscale, multifunction, turnaround time, and cost-effectiveness, significant efforts have been devoted to realizing the multi-material 3D printing of multilayer ceramic substrates in the past few decades [ 22 , 189 , 190 , 191 , 231 , 232 , 233 , 234 ]. For example, Imanaka et al [ 190 ] proposed a hybrid multi-material integration process using the combination of established AJP, chemical etching, sputtering, and plating techniques to fabricate the mesoscale multilayer ceramic structure with fine copper electrodes and vias ( Figure 10 a): employing AJP to deposit high-permittivity BaTiO 3 films, chemical etching to selectively remove materials for shaping the via holes on the as-deposited BaTiO 3 films and internal electrodes on the Cu sputter films, and plating to realize the metallization of via holes.…”
Section: Applications Of Multi-materials 3d Printing In Functional Ce...mentioning
confidence: 99%
“…Significant mismatching of the coefficient of thermal expansion (CET) between alumina (CET = 7.1 × 10 −6 /°C) dielectric and tungsten (CET = 4.10 × 10 −6 /°C) conductors would cause delamination at the ceramic/metal interfaces during co-firing. To reduce such delamination risk, Bernard et al [ 234 ] replaced the tungsten paste used in experiments outlined by Raynaud et al with molybdenum (CET = 5.35 × 10 −6 /°C) paste and demonstrated molybdenum conductors in the HTCC structures perfectly followed the profile of the alumina dielectric after cofiring. Indeed, such a solution coupling SLA with DIW is an advancement for multi-material 3D printing of multilayer ceramic structures (e.g., substrates, solid oxide fuel cells, and customized ceramic electronics); however, it requires an expensive apparatus.…”
Section: Applications Of Multi-materials 3d Printing In Functional Ce...mentioning
confidence: 99%
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