Feasibility on a piezoresistive tactile normal force sensor array

Yue, Shichao; Moussa, Walied A.; Williston, L. Richard

doi:10.1007/s00339-014-8491-3

Cited by 6 publications

(2 citation statements)

References 11 publications

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“…Compared to two-terminal resistors, four-terminal devices have proved to be more thermally stable and suitable for the miniaturization of sensors, since they do not require any external Wheatstone bridge [17][18][19][20][21] . Under a mechanical shear strain, a voltage is generated across two terminals of four-terminal devices due to the distortion of potential distribution, and this phenomenon has been named as the pseudo-Hall effect 22,23 . To date, there have been various studies on the pseudo-Hall effect in silicon material, and in fact this effect in Si has been utilized in commercial strain sensors for more than two decades 23,24 .…”

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“…[17][18][19][20][21] Under a mechanical shear strain, a voltage is generated across two terminals of four-terminal devices due to the distortion of potential distribution, and this phenomenon has been named as the pseudo-Hall effect. 22,23 To date, there have been various studies on the pseudo-Hall effect in silicon material, and in fact this effect in Si has been utilized in commercial strain sensors for more than two decades. 23,24 However, the work on the pseudo-Hall effect in SiC has been rarely reported.…”

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Orientation dependence of the pseudo-Hall effect in p-type 3C–SiC four-terminal devices under mechanical stress

et al. 2015

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Orientation dependence of the pseudo-Hall effect in p-type 3C–SiC four-terminal devices under mechanical stress

et al. 2015

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Characterization of the Piezoresistive Effect in p-Type Single Crystalline 3C-SiC

Phan

2017

Piezoresistive Effect of P-Type Single Crystalline 3c-SiC

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A flexible tactile sensor calibration method based on an air-bearing six-dimensional force measurement platform

Huang

2015

Review of Scientific Instruments

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A number of common issues related to the process of flexible tactile sensor calibration are discussed in this paper, and an estimate of the accuracy of classical calibration methods, as represented by a weight-pulley device, is presented. A flexible tactile sensor calibration method that is based on a six-dimensional force measurement is proposed on the basis of a theoretical analysis. A high-accuracy flexible tactile sensor calibration bench based on the air-bearing six-dimensional force measurement principle was developed to achieve a technically challenging measurement accuracy of 2% full scale (FS) for three-dimensional (3D) flexible tactile sensor calibration. The experimental results demonstrate that the accuracy of the air-bearing six-dimensional force measurement platform can reach 0.2% FS. Thus, the system satisfies the 3D flexible tactile sensor calibration requirement of 2% FS.

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Feasibility on a piezoresistive tactile normal force sensor array

Cited by 6 publications

References 11 publications

Orientation dependence of the pseudo-Hall effect in p-type 3C–SiC four-terminal devices under mechanical stress

Orientation dependence of the pseudo-Hall effect in p-type 3C–SiC four-terminal devices under mechanical stress

Characterization of the Piezoresistive Effect in p-Type Single Crystalline 3C-SiC

A flexible tactile sensor calibration method based on an air-bearing six-dimensional force measurement platform

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