Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element

HaLevy, Omer; Krakover, Naftaly; Krylov, Slava

doi:10.1016/j.ijnonlinmec.2019.103255

Cited by 20 publications

(5 citation statements)

References 37 publications

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“…We have emphasized that this occurs not only for the attractors experimentally followed by the sweeps, but also for the other branches captured in the simulations. Counting on nonlinearities for a wide operational range is promising in many different applications [58][59][60][61][62][63][64][65][66]. The main achievements reported in the present paper have been commented and their generality has been highlighted, since similar features may occur in different systems.…”

Section: Discussionmentioning

confidence: 61%

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

et al. 2021

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This work investigates the dynamics of a microbeam-based MEMS device in the neighborhood of a 2:1 internal resonance between the third and fifth vibration modes. The saturation of the third mode and the concurrent activation of the fifth are observed. The main features are analyzed extensively, both experimentally and theoretically. We experimentally observe that the complexity induced by the 2:1 internal resonance covers a wide driving frequency range. Constantly comparing with the experimental data, the response is examined from a global perspective, by analyzing the attractor-basins scenario. This analysis is conducted both in the thirdmode and fifth-mode planes. We show several metamorphoses occurring as proceeding from the principal resonance to the 2:1 internal resonance, up to the final disappearance of the resonant and non-resonant attractors. The shape and wideness of all the basins are examined. Despite they are progressively eroded, an appreciable region is detected where the compact cores of the attractors involved in the 2:1 internal resonance remain substantial, which allows effectively operating them under realistic conditions. The dynamical integrity of each resonant branch is discussed, especially as approaching the bifurcation points where the system becomes more vulnerable to the dynamic pull-in instability.

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Section: Discussionmentioning

confidence: 61%

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

et al. 2021

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“…6 Parametric resonance breaks into the engineering of filters, 7 flow sensors, 8 and mass sensors, 9 as well as in boosting the sensitivity of gyroscopes. 10,11 The design of MEMS devices based on the co-existence of multiple stable solutions has inspired gas sensors, 12 shock sensors, 13 accelerometers, 14 and flow sensors. 15 In order to properly master and exploit nonlinearities, improved modeling capabilities are essential.…”

Section: Introductionmentioning

confidence: 99%

Deep learning‐based reduced order models for the real‐time simulation of the nonlinear dynamics of microstructures

Fresca

Gobat

Fedeli

et al. 2022

Numerical Meth Engineering

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We propose a non‐intrusive deep learning‐based reduced order model (DL‐ROM) capable of capturing the complex dynamics of mechanical systems showing inertia and geometric nonlinearities. In the first phase, a limited number of high fidelity snapshots are used to generate a POD‐Galerkin ROM which is subsequently exploited to generate the data, covering the whole parameter range, used in the training phase of the DL‐ROM. A convolutional autoencoder is employed to map the system response onto a low‐dimensional representation and, in parallel, to model the reduced nonlinear trial manifold. The system dynamics on the manifold is described by means of a deep feedforward neural network that is trained together with the autoencoder. The strategy is benchmarked against high fidelity solutions on a clamped‐clamped beam and on a real micromirror with softening response and multiplicity of solutions. By comparing the different computational costs, we discuss the impressive gain in performance and show that the DL‐ROM truly represents a real‐time tool which can be profitably and efficiently employed in complex system‐level simulation procedures for design and optimization purposes.

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“…Three typical phenomena are used for latching: electrostatic (i.e. pull-in effect) [10][11][12][13], electromagnetic [7,[14][15][16][17] and mechanical clamping phenomenon [1,4,[18][19][20][21]. Among them, electromagnetic type exhibits none power consumption, non-existence of contact force (free of worn out/fatigue problem), capable of repulsive/attractive forces, and shows great potential in application.…”

Section: Introductionmentioning

confidence: 99%

A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil

Wang¹,

Xie²,

Zhang³

et al. 2022

J. Micromech. Microeng.

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This paper presents a bi-stable mechanism, which mainly consists of a suspended mass, a spacer and a bottom plate. Electromagnetic actuation is used for switching between two states (i.e. "On/Off" state). The actuation is achieved via permanent magnet on the suspended mass and micro-coils embedded in the bottom plate. Different from spiral coil and central core in conventional design, micro-coils in this paper integrate Cu and Ni together as a whole, acting as both coil and ferromagnetic core. This integration simplifies the fabrication into one-mask process. Furthermore, chessboard patterned permanent magnet is utilized with Cu-Ni integrated micro-coils to generate enhanced force density. The bi-stable mechanism is designed, fabricated and experimentally characterized. Total size of this mechanism is 16×14×2mm3. No power is needed for holding either of the state. Switching processes (both "On" to "Off" and "Off" to "On") can be realized with external acceleration of 24G (gravity) and 37G, respectively. Furthermore, resetting (i.e. "On" to "Off") can also be accomplished with 1.5A current input.

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Feasibility study of a resonant accelerometer with bistable electrostatically actuated cantilever as a sensing element

Cited by 20 publications

References 37 publications

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

Internal resonance in the higher-order modes of a MEMS beam: experiments and global analysis

Deep learning‐based reduced order models for the real‐time simulation of the nonlinear dynamics of microstructures

A bi-stable mechanism actuated by patterned permanent magnet and Cu-Ni integrated micro-coil

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