2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) 2021
DOI: 10.1109/eurosoi-ulis53016.2021.9560685
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Feature-Scale Modeling of Low-Bias SF6 Plasma Etching of Si

Luiz Felipe Aguinsky
1
,
Georg Wachter
2
,
Frâncio Rodrigues
3
et al.
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