Feature size below 100 nm realized by UV-LED-based microscope projection photolithography

Zheng, Lei; Birr, Tobias; Zywietz, Urs; Reinhardt, Carsten; Roth, Bernhard

doi:10.37188/lam.2023.033

Cited by 2 publications

(2 citation statements)

References 45 publications

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“…The pores of MOFs can be refilled with other compounds, which makes MOFs attractive for applications in various fields, such as gas storage and seperation [2][3][4] , gases/vapors/volatile compounds sensing and detection [5][6][7] , among others. With the advancement of optical fabrication technologies [8][9][10][11][12][13][14][15][16][17][18][19][20][21] , MOF-based optical sensing devices, which rely on light-matter interaction within a thin MOF layer, have experienced a rapid increase in research interest in recent years. The advanced fabrication technologies can be well applied in the production of optical devices combined with MOF coatings for sensing applications 16,22,23 .…”

Section: Introductionmentioning

confidence: 99%

MOF-on-MOF layer-coated optical fiber sensor for water vapor sensing

Zheng,

Bhatia,

Steinbach

et al. 2024

Integrated Optics: Devices, Materials, and Technologies XXVIII

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We present a simple optical fiber sensor with a MOF-on-MOF (Co-ZIF-90-on-ZIF-8 in this work) coating for water vapor sensing and detection, with a sensing mechanism based on the refractive index variation as a function of analyte adsorption within the MOF layer. A seeding layer approach was employed to grow the MOF-on-MOF layers with high quality for optical sensing application. The resulting sensor exhibits stable sensitivity to water vapors with excellent reversibility of vapor adsorption and desorption. The evaluated adsorption and desorption times of water vapor are approximately 48 seconds and 29 seconds, respectively. The demonstrated bi-layer MOF-based optical sensor provides the potential to further develop easy-to-fabricate sensors as well as multiplexed and distributed sensors in an inexpensive and reproducible way.

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Section: Introductionmentioning

confidence: 99%

MOF-on-MOF layer-coated optical fiber sensor for water vapor sensing

Zheng,

Bhatia,

Steinbach

et al. 2024

Integrated Optics: Devices, Materials, and Technologies XXVIII

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“…A record small feature size for a home-build setup of 85 nm is obtained in Ref. [ 17 ]. This accomplishment was made possible by utilizing a high-aperture immersion objective (numerical aperture = 1.4) and a 365 nm-wavelength UV-LED for projection lithography using chromium photomasks.…”

Section: Introductionmentioning

confidence: 99%

Cost-Effective Laboratory Matrix Projection Micro-Lithography System

Galiullin,

Pugachev,

Duleba

et al. 2023

Micromachines

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This paper presents a home-built projection lithographer designed to transfer the image from a DLP (digital light processing) projector MEMS matrix onto the microscope objective’s field of view, where a photoresist-covered substrate is placed. The photoresist is exposed using blue light with a wavelength of 450 nm. To calibrate the device and adjust focal lengths, we utilize a red light that does not affect the photoresist. The substrate is located on a movable platform, allowing the exposure field to be shifted, enabling the exposure of designs with lateral sizes of 1 × 1 cm2 at a resolution of a few micrometers. Our setup showcases a 2 μm resolution for the single frame 200 × 100 μm2, and a 5 μm resolution for 1 × 1 cm2 with field stitching. The exposure speed, approximately 1 mm2/100 s, proves to be sufficient for a variety of laboratory prototyping needs. This system offers a significant advantage due to its utilization of easily accessible and budget-friendly components, thereby enhancing its accessibility for a broader user base. The exposure speed and resolution meet the requirements for laboratory prototyping in the fields of 2D materials, quantum optics, superconducting microelectronics, microfluidics, and biology.

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Feature size below 100 nm realized by UV-LED-based microscope projection photolithography

Cited by 2 publications

References 45 publications

MOF-on-MOF layer-coated optical fiber sensor for water vapor sensing

MOF-on-MOF layer-coated optical fiber sensor for water vapor sensing

Cost-Effective Laboratory Matrix Projection Micro-Lithography System

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