Features of circuitry of acousto-optic laser measuring systems for controlling three-coordinate (3D) movements of products and equipment elements. Part 1

Abstract

The article is devoted to the construction of acousto-optic (AO) laser measuring systems (LMS) for measuring product displacements in three coordinates (3D): with one longitudinal Δl z and two transverse Δl x , Δl y with high resolution and an increased measurement range for the latter two. The paper discusses the circuitry of the measuring circuit based on the phase-locked loop (PLL) system, which makes it possible to achieve the maximum resolution when the AO LMS operates in the start-stop mode, i.e. starting and ending with a stationary state at v=0. The paper considers the possibilities of using a prismatic optical scheme, which makes it possible to use a one-axis (1D) AO modulator to control two-coordinate (2D) displacements Δl x , Δl y of a laser beam, a multi-aperture AO modulator, a fiber photodetector and other units

Features of an acousto-optical two-channel laser displacement interferometer with multi-frequency photodetectors with subpycometer resolution

“…At Δf=4·10 7 Hz and P NEP =30·10 -12 W/Hz 1/2 by using equation ( 12), the value Q≈1000 was calculated by calculation [15,16]. However, similar some articles [15,16,18,19], to increase the reliability of the results obtained, a lower value, namely, Q≈600, will be taken as the basis for further calculations. The calculations given in [15,16] showed that the level of shot noise was ~30% of the total noise level.…”

“…It shows: laser 1, AO modulator 2, optical circuit 3, movable trippel prism 4, two microlenses 5 and 6 for two Y-shaped fiber-optic (FO) splitters 7 and 8, HF photodetector 9, LF photodetector 10, phase interpolator (in futureinterpolator) 11, PLL 12, adder 13, phase meter 14. The PLL 12 is described in [18][19][20] and has a standard circuit in the form of a ring from a serial circuit of a phase detector (with an additional digital output N pd ), a low-pass filter, a voltage-controlled generator (VCG) based on a highly stable quartz oscillator, the frequency output signal of which is fed to the AO modulator 2. The cutoff frequency of the low-pass filter is controlled by a frequency detector depending on the Doppler frequency rise, the effect of which is discussed further (not shown in figure 1).…”

“…The photodetector 9, the interpolator 11 and the adder 13 form a "fast inaccurate" channel of AO LDI, and the photodetector 10, the PLL system 12 and the phase meter 14 are "slow accurate". In the process of operation, laser radiation 1, following through the AO modulator 2, forms the first E(+1) and zero E(0) diffraction orders of different frequencies that pass through the optical system 3, are spatially separated in it and then follow the routes, respectively: -movable trippel-prism The detailed operation of the channel wallpaper is described in [18][19][20]. The possibility and conditions of using optical fibers in the lip, make it possible to make the scheme of AO LDI more compact.…”

“…An expression is known for the phase error caused by the photodetector's own noise Δφ , based on the signal-to-noise ratio Q and written by the formula [18][19][20]:…”

“…The current trend of their improvement is to increase the resolution to the level of subpicometric values, less than 1 ρm [7][8][9]. LDI with acousto-optic (AO) modulation of the optical flow can be considered one of the most promising [11][12][13][14][15][16][17][18][19][20]. To increase the resolution of AO LDI, it was proposed to use two measuring channels (in future -channel) with the same stages for measuring cyclic start-stop movements: "fast inaccurate" and "slow accurate".…”