Features of formation of gas cluster ion beams

Korobeishchikov, N. G.; Kalyada, V. V.; Skovorodko, P. А.; Shmakov, A. A.; Khodakov, M. D.; Shulzhenko, G. I.; Voskoboynikov, R. V.; Zarvin, A. E.

doi:10.1016/j.vacuum.2015.05.039

Cited by 16 publications

(4 citation statements)

References 21 publications

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“…The optimal longitudinal position of the nozzle relative to the skimmer has been found by a method of visualization of the nozzle jet in glow discharge described in [19,20]. We removed the ionizer and both diaphragms and applied a voltage of +700 V to the extractor.…”

Section: Resultsmentioning

confidence: 99%

Design and experimental testing of a gas cluster ion accelerator

Zeng¹,

Pelenovich²,

Liu³

et al. 2017

Chinese Phys. C

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A gas cluster ion beam (GCIB) system with cluster energy up to 12 keV has been designed. To facilitate pumping of the nozzle chamber and increased pressure of the gas source up to 10 atm, pulse mode was used for the gas feeding. Argon was employed as the working gas. To separate monomers from clusters, both electromagnet and retarding electrode were utilized. A maximal pulsed cluster current of 90 nA has been achieved. The shape of pulsed ion beam currents has been analyzed in detail at different applied magnetic and retarding electric fields.

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Section: Resultsmentioning

confidence: 99%

Design and experimental testing of a gas cluster ion accelerator

Zeng¹,

Pelenovich²,

Liu³

et al. 2017

Chinese Phys. C

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“…The cluster beam was formed by adiabatic expansion of high purity argon [13]. The cluster ion beam parameters were determined using the time-of-flight technique [14]. To study the influence of the parameters of cluster ions on the processing of the KTP surface, significantly different energies per atom in cluster E/N mean were selected: 12.5 eV/atom (low-energy mode) and 110 eV/atom (high-energy mode).…”

Section: Methodsmentioning

confidence: 99%

“…The PSD function is the Fourier transform of the distribution of irregularity heights on the surface, and it is the function depending on spatial frequency ν [15][16][17]. We clarify here that the spatial frequency ν is a measure of how often the same height repeats per unit of distance [14]. The PSD function is helpful to determine the effective roughness σ eff [12], which takes into account the lateral roughness as opposed to the convention root-mean-square (RMS) roughness R q .…”

Section: Methodsmentioning

confidence: 99%

Influence of the Parameters of Cluster Ions on the Formation of Nanostructures on the KTP Surface

Nikolaev

Korobeishchikov

2021

Applied Nano

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In this work, the formation of periodic nanostructures on the surface of potassium titanyl phosphate (KTP) has been demonstrated. The surface of KTP single crystals after the processing of argon cluster ions with different energy per cluster atom E/Nmean = 12.5 and 110 eV/atom has been studied using atomic force microscopy (AFM). To characterize the nanostructures, the power spectral density (PSD) functions have been used. The features of the formation of periodic nanostructures are revealed depending on the incident angle of clusters and different energy per atom in clusters.

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“…Принципиальное описание экспериментального оборудования приведено в [11]. Для определения параметров пучка кластерных ионов использовалась времяпролетная диагностика [12]. Бомбардировку поверхности монокристаллов КТР проводили кластерными ионами аргона с различной энергией, приходящаяся на один атом в кластере, -E/Nmean = 12.5 и 110 эВ/атом.…”

Section: материалы и методыunclassified

Наноструктурирование Поверхности Монокристалла KTP С Помощью Бомбардировки Кластерными Ионами

Nikolaev¹,

Korobeishchikov²

2022

8th International Congress on Energy Fluxes and Radiation Effects

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Рассмотрено формирование самоупорядоченных периодических наноструктур на поверхности титанил-фосфата калия (KTP) при бомбардировки кластерными ионами аргона. Проведено сравнение результатов бомбардировки кластерными ионами аргона с различной энергией, приходящейся на 1 атом кластера E/N mean – 12.5 и 110 эВ/атом. Продемонстрировано изменение рельефа поверхности с помощью атомно-силовой микроскопии (АСМ). Для определения периода наноструктур использовалась функция спектральной плотности мощности (power spectral density, PSD). Выявлены особенности бомбардировки поверхности монокристалла KTP при нормальном и наклонном падениях кластерных ионов.

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Features of formation of gas cluster ion beams

Cited by 16 publications

References 21 publications

Design and experimental testing of a gas cluster ion accelerator

Design and experimental testing of a gas cluster ion accelerator

Influence of the Parameters of Cluster Ions on the Formation of Nanostructures on the KTP Surface

Наноструктурирование Поверхности Монокристалла KTP С Помощью Бомбардировки Кластерными Ионами

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