“…The synthesis of nanolayers of the dispersed phase (TiC) was carried out by the method of directed synthesis developed in Russia—molecular layering (ML) [ 3 – 6 , 13 , 25 – 27 ], also known abroad under the name “atomic layer deposition” (ML-ALD) [ 8 , 13 , 28 – 34 ]. Currently this method is recognized by foreign experts as the main method for production of nanolayers in nanoelectronics and in a number of other related areas [ 9 , 10 , 25 , 35 ].…”