2024 International Symposium ELMAR 2024
DOI: 10.1109/elmar62909.2024.10693967
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Fed-SEMI: A Federated Machine Learning Framework for Nano-Scale Defect Classification and Detection in Semiconductor Manufacturing with Decentralized and Private Data

Bappaditya Dey,
Jacob Deforce,
Victor Blanco
et al.
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