Feed-forward control of fast tool servo for real-time correction of spindle error in diamond turning of flat surfaces

Kim, Ho-Sang; Kim, Eui–Jung

doi:10.1016/s0890-6955(03)00156-1

Cited by 62 publications

(29 citation statements)

References 3 publications

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“…Diamond turning using a fast tool servo (FTS) is the most popular technique which can compensate the motion errors of diamond-turning machines [1][2][3][4] or produce freeform optical surfaces [5][6][7][8]. The working principle of FTS is shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

A flexure-based long-stroke fast tool servo for diamond turning

Liu

Zhou

et al. 2011

Int J Adv Manuf Technol

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This paper describes the development of the fast tool servo (FTS) in detail and categorizes existing FTSs according to different principles. The characteristics and differences of these FTSs have been analyzed. A flexurebased long-stroke FTS system for diamond turning is presented with displacement range of 1 mm and bandwidths of 10 Hz. The vertical jump is about 0.045 μm, and the full stroke tracking error is less than 0.15%. A voice coil motor and a piezoelectric actuator are used as the driving elements, and two flexure hinges are developed as the guide mechanisms. The FTS utilizes a linear encoder and a capacitive sensor to measure the displacement of the tool for closed-loop control. The electromechanical design of the FTS and its motion analysis are described. Experimental tests have been carried out to verify the performance of the FTS system. This long-stroke FTS has the advantage of easy machining, high resonance frequency, and error compensation in y-axis direction.

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Section: Introductionmentioning

confidence: 99%

A flexure-based long-stroke fast tool servo for diamond turning

Liu

Zhou

et al. 2011

Int J Adv Manuf Technol

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“…But they seldom considered the actual application in precision engineering (PE). On the contrary some FTSs have been designed taking little account of the design principles of CMs (Cuttino et al, 1999;Gan et al, 2007;Huo and Cheng, 2008;Kim and Kim, 2003;Kim et al, 2004Kim et al, , 2009Kouno, 1984;Noh et al, 2009;Spotts et al, 2004;Tian et al, 2009). Therefore, there is a need for a comprehensive and robust design method combining with CMs and PE to meet the stringent requirements of ultra precision machining.…”

Section: Introductionmentioning

confidence: 99%

“…Cuttino (1999) used two annular flexures in his FTS but the design bandwidth is only 100 Hz. The CM Correspondence to: K. Cheng (kai.cheng@brunel.ac.uk) with two sets of parallel circle notch flexure hinges was introduced by Gan et al (2007), Huo and Cheng (2008), Kim and Kim (2003), Kim et al (2004Kim et al ( , 2009, Tian et al (2009). Kim and Kim (2003) and Kim et al (2004) designed a FTS giving a stroke and natural frequency of 7.5 µm and 100 Hz respectively.…”

Section: Introductionmentioning

confidence: 99%

“…The CM Correspondence to: K. Cheng (kai.cheng@brunel.ac.uk) with two sets of parallel circle notch flexure hinges was introduced by Gan et al (2007), Huo and Cheng (2008), Kim and Kim (2003), Kim et al (2004Kim et al ( , 2009, Tian et al (2009). Kim and Kim (2003) and Kim et al (2004) designed a FTS giving a stroke and natural frequency of 7.5 µm and 100 Hz respectively. In order to increase the stroke of the FTS, a flexure mechanism amplifier was embedded on the CM and the stroke was increased to 432 µm but the stiffness decreased (Kim et al, 2009).…”

Section: Introductionmentioning

confidence: 99%

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Design and principles of an innovative compliant fast tool servo for precision engineering

Ibrahim

Cheng

2011

Mech. Sci.

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Abstract. The paper presents an innovative design of fast tool servo (FTS) by combining compliant mechanism (CM) and precision engineering (PE) so as to meet the stringent requirements of a one degree of freedom (1DOF) compact FTS. The design requirements of the FTS include: (a) 1 nm resolution, (b) 10-20 µm of range, (c) first natural frequency of over 1400 Hz, (d) compatibility with holding different diamond cutting tools, and (e) without fatigue of the compliant mechanism. Then FEA is used to evaluate the static and dynamic performance of the FTS. The preliminary results show that both the static and dynamic performances are matched to the design objectives.

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“…In particular, fast-tool servos (FTS) are able to perform dynamic compensation of the spindle [3,4], while allowing machining none rotationally symmetric or out of axis surface figures. Several recent studies focused on thermal growth errors of air bearings spindles and FTS systems were developed to improve machining performance by real time compensation of those errors [5].…”

Section: Introductionmentioning

confidence: 99%