2024 8th IEEE Electron Devices Technology &Amp;amp; Manufacturing Conference (EDTM) 2024
DOI: 10.1109/edtm58488.2024.10511528
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Feedback-based Selective Attenuated Phase Shift Mask for Improved Resist Profile Generation in Optical Lithography

Tanmay Joshi,
Subhradip Chakraborty,
Sumit Ambuskar
et al.
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