Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- And Nanosystem 2007
DOI: 10.1115/detc2007-35400
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Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Abstract: This paper presents research on the development of microelectromechanical systems (MEMS) micromirror arrays with precise and accurate positioning enabled by the use of closed-loop control techniques. The MEMS mirror arrays are one degree-of-freedom, electrostatically actuated and exhibit nonlinear actuation profiles that include pull-in and hysteresis. The device performance is subject to parametric uncertainties from the fabrication process. Preliminary proportional-integrator (PI) controllers are studied in … Show more

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Cited by 2 publications
(1 citation statement)
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“…From a closed-loop control point of view a number of approaches, both linear and nonlinear, have been proposed. A useful survey on control techniques is given in [4] and [1] -in particular referring to micromirrors [26]. The designers follow two approaches: (i) charge control and (ii) voltage control, with the latter being more favourable due to the presence of parasitic capacitances in controlling the charge.…”
Section: Introductionmentioning
confidence: 99%
“…From a closed-loop control point of view a number of approaches, both linear and nonlinear, have been proposed. A useful survey on control techniques is given in [4] and [1] -in particular referring to micromirrors [26]. The designers follow two approaches: (i) charge control and (ii) voltage control, with the latter being more favourable due to the presence of parasitic capacitances in controlling the charge.…”
Section: Introductionmentioning
confidence: 99%