FEM Modeling of Multilayer Piezo-magnetic Structure Based Surface Acoustic Wave Devices for Magnetic Sensor

Elhosni, Meriem; Elmazria, O.; Talbi, Abdelkrim; Aissa, K. Ait; Bouvot, L.; Sarry, F.

doi:10.1016/j.proeng.2014.11.276

Cited by 12 publications

(14 citation statements)

References 6 publications

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“…Thus, the Q factor behavior follows the Young Modulus one. Considering the previously performed optimization of the ZnO and Ni layers regarding the SAW sensor sensitivity to the magnetic field and the electromechanical coupling coefficient (K 2 ), their thicknesses were fixed at 250 nm and 200 nm, respectively [23].…”

Section: Figmentioning

confidence: 99%

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Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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This study describes the numerical implementation of accurate and fully coupled physical models in order to investigate the sensitivity of Surface Acoustic Wave (SAW) devices using the magnetoelastic interaction with an external magnetic field. The model was first validated using experimental data previously published by Kadota et al., obtained with SAW resonators based on quartz substrates and nickel InterDigital Transducers (IDTs). The model was then used to optimize the geometry of a new magnetostrictive-piezoelectric layered structure (Ni/ZnO/IDT/LiNbO3), regarding its sensitivity to the magnetic field intensity. The optimized structure was designed and fabricated and experimental results show a good correlation with the numerical modeling. Simulations also show that if alumina is used instead of ZnO, the Ni/Al2O3/IDT/LiNbO3 structure exhibits a sensitivity that is 9 times higher than the one based on ZnO.

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Section: Figmentioning

confidence: 99%

“…To confirm our theoretical predictions, a Ni/ZnO/IDT/LiNbO3 structure optimized by FEM modeling was fabricated. In the first step, the aluminum IDTs of the delay line were fabricated on the surface of a 128°Y-X [23].…”

Section: Electrical Characterizationmentioning

confidence: 99%

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Elhosni

Elmazria

Petit-Watelot

et al. 2016

Sensors and Actuators A: Physical

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“…The sensor uses the surface acoustic wave (SAW) effect with the advantages such as high sensitivity, easy fabrication, so that it has been widely applied to measure physical quantities such as temperature, concentration, current, deformation, magnetic field intensity, ... [1][2][3][4][5][6] . Recently, the magnetic sensors with SAW structure have been studied by many groups because of their important role in many applications 3,4,[6][7][8] . In fact, the magnetic sensors operate basing on different physical effects or the combination of many physical effects.…”

Section: Introductionmentioning

confidence: 99%

“…Magnetoelectric effect (ME) is a combination of magnetostriction effect and piezoelectric effect with sandwich structure, the studies often use three material layers (such as: Terfenol-D/PZT/Terfenol-D, Fe/P/Fe,...) in which the middle layer is piezoelectric material, the upper and lower layers are magnetostrictive materials, and this structure, the sensor gives the output of voltage response 9,10 . Another popular combination is to use the surface acoustic wave on the piezoelectric material combined with the magnetostrictive material by delay-line structure, which creates a magnetic sensor with large sensitivity and high working frequency 1,4,10 . Optimizing the structure and improving the response of the sensor have been performed by many research groups.…”

Section: Introductionmentioning

confidence: 99%

“…Optimizing the structure and improving the response of the sensor have been performed by many research groups. The study 11 selects to change the material type in the intermediary layer of the magnetic sensitive layer and the piezoelectric substrate with two structures Ni/Al 2 O 3 /IDT/LiNbO 3 and Ni/ZnO/IDT/LiNbO 3 . The result reflects that the structure using the Al2O 3 intermediary layer has larger sensitivity than the structure using the ZnO intermediary layer does.…”

Section: Introductionmentioning

confidence: 99%

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Simulating the piezoelectric substrate influence on the characteristics of surface acoustic wave-magnetostriction sensor based on the FeNi magnetic sensitive material

Phu

Hoang²,

Le³

2022

Sci.Tech.Dev.J.-Eng.Tech.

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This paper simulates the influence of two piezoelectric substrate types on the sensitivity and measuring range of surface acoustic wave-magnetostriction (SAW-MO) sensor by the finite elements method (FEM) based on using the FeNi magnetic sensitive layer with E-H chacrateristics (Young’s Modulus – Magnetic field intensity). The sensor structure selected for the study is the delay-line: the distance between the two sets of electrodes is 5mm, the number of finger pairs of each electrode set is 25, and the distance-width between the fingers is 10m regularly, the electrode material is aluminum. The piezoelectric substrates chosen for simulation are LiNbO3 and AlN in which the LiNBO3 piezoelectric substrate is the block form with the surface velocity of 3318.1m/s and the AlN piezoelectric substrate is the thin film with the surface wave velocity of 5598.9m/s. So the generality is ensured when evaluating their influence on the response of SAW-MO sensor. For magnetic sensitive materials, the group selected the FeNi which E-H characteristics was experimentally built. During simulation by finite elements method, the sensor structure is tested with many datasets whose number of divided elements is different. However, the simulation results have converged with the number of divided elements is 113556. The simulation result shows that the sensivity of the FeNi/IDT/AlN structure magnetic sensor is larger than the FeNi/IDT/LiNbO3 structure magnetic sensor with sensitivities of 8.698kHz/Oe and 2.345kHz/Oe, respectively. The result also indicates that the response range of the FeNi/IDT/AlN magnetic sensor is [0 ÷ 109]Oe, which is smaller than the FeNi/IDT/LiNbO3 magnetic sensor is [0 ÷ 190]Oe.

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Effects of functionally graded interlayers on dispersion relations of shear horizontal waves in layered piezoelectric/piezomagnetic cylinders

Guo¹,

Wei²,

Li³

et al. 2018

Applied Mathematical Modelling

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FEM Modeling of Multilayer Piezo-magnetic Structure Based Surface Acoustic Wave Devices for Magnetic Sensor

Cited by 12 publications

References 6 publications

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Magnetic field SAW sensors based on magnetostrictive-piezoelectric layered structures: FEM modeling and experimental validation

Simulating the piezoelectric substrate influence on the characteristics of surface acoustic wave-magnetostriction sensor based on the FeNi magnetic sensitive material

Effects of functionally graded interlayers on dispersion relations of shear horizontal waves in layered piezoelectric/piezomagnetic cylinders

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