Fem modelling of an electro-optical micro-shutter

Roux, P.; Woirgard, Eric; Pizzi, M.; Martiis, O. De; Koniachkine, V.

doi:10.1016/j.sna.2004.06.022

Cited by 10 publications

(10 citation statements)

References 3 publications

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“…Likewise, metal-based but in the relaxed state nonplanar (i.e., curled/rolled), in contrast, are optical MEMS that are usually called shutter arrays [12][13][14][15][16][17] or microblinds. 18 Shutter-array-based MOEMS have been reported for transmission modulated smart glass, 12,18 space instrumentation, 13 camera shutters, 15 and displays.…”

Section: Introductionmentioning

confidence: 99%

MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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Micro-opto-electro-mechanical systems (MOEMS) micromirror and shutter arrays have gained huge interest in research and applications. Our study starts with an overview on the technological achievements and experimental results of groups that have been working on this field. The main part of our study is revealing the MOEMS micromirror array technology for light steering via smart glazing for buildings. The mirror array is actuated electrostatically and integrated between the panes of insulation glazing. Depending on user activity as well as daytime and season requirements, the MOEMS micromirror arrays shall enable personalized light steering, energy saving, and reduction of CO 2 emission. Technological fabrication of subfield addressing up to 64 fields inside the arrays is presented. Experimental characterization results such as actuation voltages, maximum and minimum transmission, contrast, and energy saving potential are reported. Using an industrial window module fabrication process, a laboratory demonstrator and a function demonstrator have been implemented. Rapid aging tests including vibrations, extreme temperatures, multiple temperature cycles, and long-term electrostatic actuation of micromirror structure were performed to evaluate reliability and lifetime. These results validate extrapolated lifetimes-in future applications as active windows-far beyond 40 years, as well as their robustness during transportation, installation, and against all vibration influences in buildings. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 99%

MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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“…5(a)]. 33,34 They did not reveal much about the fabrication; nevertheless, their microshutters are relatively big (0.5 to 2 mm) and required around 80 V actuation voltage. Modeling results were obtained in collaboration with the Université de Bordeaux.…”

Section: Fiat Italymentioning

confidence: 99%

“…Microblinds were also compared with other switchable glass technologies in review papers 14,15 and market reports. [19][20][21] Several groups have worked on various versions of microshutters, namely NRC, 17 New Visual Media Group (NVMG), 22,23 University of Kassel, 24,25 Institut National d'Optique (INO), 26 University of Tokyo, 27 Samsung, 28 U.S. Air Force (USAF), 29 Korea Advanced Institute of Science and Technology (KAIST), 30,31 Microelectronic Center of North Carolina (MCNC), 32 Fiat, 33,34 and University of Stuttgart. 35 These groups used various versions of curling electrodes actuated by electrostatic forces for switchable glass applications (window, display, imaging, eyewear, etc.).…”

Section: Introductionmentioning

confidence: 99%

Review of microshutters for switchable glass

Lamontagne

Fong

Song

et al. 2019

J. Micro/Nanolith. MEMS MOEMS

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Background: Switchable glasses allow the control of light transmission-an attractive property for applications such as car sunroofs, aircraft windows, building windows, augmented reality, imaging, and displays. Commercialized switchable glasses have severe limitations, such as speed, cost, and operating conditions, among others. Microshutters, a type of switchable glass with very distinctive properties, are reviewed, as they are a technology that could significantly improve some or all of the shortcomings mentioned above. Aim: We will summarize the various types of microshutters and tentatively identify various critical designs, fabrication schemes, and performance criteria by the many research groups implementing them and investigating their properties. Approach: We will describe the various approaches used to control light transmission through microelectromechanical systems. It will compare their performances and comment on fabrication and implementation challenges. Conclusions: Microshutters have performance levels that could make them good candidates for switchable glasses. Many research groups have investigated various approaches to fabricate microshutters and have shown that they can be implemented reliably on a small scale, with fast actuation, low power, and high contrast and are relatively easy to manufacture. Work is needed to demonstrate that they can be scaled-up and still be economical to produce.

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“…(48), can be obtained as (50) It is now possible to write an expression for the deflection within the element, i.e. , in a standard form as (51) By considering similar relations for rotations ( ), it is possible to interpolate the displacement vector within the element in the following standard form (52) in which is the Kronecker tensor product; is the shape function matrix and is the vector of 27-degree-of-freedom of triangular most general Mindlin plate element which is determined as follows (53) In order to calculate the strain field, the first and second derivatives of shape functions with respect to global coordinate are required which may be conveniently obtained by a relatively simple chains rule as follows…”

Section: Finite Element Formulation Of Triangular Microplate Elementmentioning

confidence: 99%

“…Some researchers used FEM to analyze the mechanical behavior of microbeams and microplates. For example, Roux et al [53] used FEM to study an electro-optical micro-shutter. Lai and Chang [54] designed and analyzed radio-frequency (RF) MEMS micro-switches with different geometries based upon FEM.…”

Section: Introductionmentioning

confidence: 99%