FEM Simulation and Characterization of Microcantilevers Resonators

Narducci, Margarita; Figueras, E.; Garcia, Isabel Krey; Fonseca, L.; Cané, C.

doi:10.1109/asdam.2006.331205

Cited by 2 publications

(4 citation statements)

References 6 publications

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“…By substituting equation (32) into equation (31), the following two equations are obtained which are separated in time and position (x,y) assuming constant plate stiffness, D(x,y) = D and plate thickness t(x) = t,…”

Section: Free Vibration Analysismentioning

confidence: 99%

“…Most of the related studies are based on a simple lumped-parameters system modeling the biosensor using the Euler-Bernoulli beam theory [21][22][23]. The finite element method has been extensively implemented for numerically modeling MC based systems [24][25][26][27][28][29][30][31][32][33]. It has emerged as a promising tool for estimating the geometry and bending stiffness of MCs [29], identifying the material and geometrical parameters of microstructures [30], verification of analytical models [31] and fabrication [32] of MCs.…”

Section: Introductionmentioning

confidence: 99%

“…The finite element method has been extensively implemented for numerically modeling MC based systems [24][25][26][27][28][29][30][31][32][33]. It has emerged as a promising tool for estimating the geometry and bending stiffness of MCs [29], identifying the material and geometrical parameters of microstructures [30], verification of analytical models [31] and fabrication [32] of MCs. The 3D dynamic behavior of an eight cantilever array structure was analyzed numerically by atomic force microscopy (AFM) showing good agreement in the lower mode but not in higher modes [33].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Faegh

Jalili

2012

J. Micromech. Microeng.

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Nanotechnological advancements have made a great contribution in developing label-free and highly sensitive biosensors. The detection of ultrasmall adsorbed masses has been enabled by such sensors which transduce molecular interaction into detectable physical quantities. More specifically, microcantilever-based biosensors have caught widespread attention for offering a label-free, highly sensitive and inexpensive platform for biodetection. Although there are a lot of studies investigating microcantilever-based sensors and their biological applications, a comprehensive mathematical modeling and experimental validation of such devices providing a closed form mathematical framework is still lacking. In almost all of the studies, a simple lumped-parameters model has been proposed. However, in order to have a precise biomechanical sensor, a comprehensive model is required being capable of describing all phenomena and dynamics of the biosensor. Therefore, in this study, an extensive distributed-parameters modeling framework is proposed for the piezoelectric microcantilever-based biosensor using different methodologies for the purpose of detecting an ultrasmall adsorbed mass over the microcantilever surface. An optimum modeling methodology is concluded and verified with the experiment. This study includes three main parts. In the first part, the Euler–Bernoulli beam theory is used to model the nonuniform piezoelectric microcantilever. Simulation results are obtained and presented. The same system is then modeled as a nonuniform rectangular plate. The simulation results are presented describing model's capability in the detection of an ultrasmall mass. Finally the last part presents the experimental validation verifying the modeling results. It was shown that plate modeling predicts the real situation with a degree of precision of 99.57% whereas modeling the system as an Euler–Bernoulli beam provides a 94.45% degree of precision. The detection of ultrasmall immobilized enzyme molecules over the cantilever surface was achieved using a self-exciting piezoelectric-based microcantilever in the dynamic mode.

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Section: Free Vibration Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Faegh

Jalili

2012

J. Micromech. Microeng.

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show abstract

“…Finite Element Method (FEM) has been extensively implemented for numerically modeling MC based systems [41–50]. It has emerged as a promising tool for estimating geometry and bending stiffness of MCs [46], identifying material and geometrical parameters of microstructures [47], verification of analytical models [48] and fabrication [49] of MCs. 3D dynamic behavior of an eight cantilever array structure was analyzed numerically by AFM showing good agreement in lower mode but not in higher modes [50].…”

Section: Introductionmentioning

confidence: 99%

A Self-Sensing Piezoelectric MicroCantilever Biosensor for Detection of Ultrasmall Adsorbed Masses: Theory and Experiments

Faegh

Jalili

Sridhar

2013

Sensors

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Detection of ultrasmall masses such as proteins and pathogens has been made possible as a result of advancements in nanotechnology. Development of label-free and highly sensitive biosensors has enabled the transduction of molecular recognition into detectable physical quantities. Microcantilever (MC)-based systems have played a widespread role in developing such biosensors. One of the most important drawbacks of all of the available biosensors is that they all come at a very high cost. Moreover, there are certain limitations in the measurement equipments attached to the biosensors which are mostly optical measurement systems. A unique self-sensing detection technique is proposed in this paper in order to address most of the limitations of the current measurement systems. A self-sensing bridge is used to excite piezoelectric MC-based sensor functioning in dynamic mode, which simultaneously measures the system's response through the self-induced voltage generated in the piezoelectric material. As a result, the need for bulky, expensive read-out equipment is eliminated. A comprehensive mathematical model is presented for the proposed self-sensing detection platform using distributed-parameters system modeling. An adaptation strategy is then implemented in the second part in order to compensate for the time-variation of piezoelectric properties which dynamically improves the behavior of the system. Finally, results are reported from an extensive experimental investigation carried out to prove the capability of the proposed platform. Experimental results verified the proposed mathematical modeling presented in the first part of the study with accuracy of 97.48%. Implementing the adaptation strategy increased the accuracy to 99.82%. These results proved the measurement capability of the proposed self-sensing strategy. It enables development of a cost-effective, sensitive and miniaturized mass sensing platform.

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FEM Simulation and Characterization of Microcantilevers Resonators

Cited by 2 publications

References 6 publications

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

Comprehensive distributed-parameters modeling and experimental validation of microcantilever-based biosensors with an application to ultrasmall biological species detection

A Self-Sensing Piezoelectric MicroCantilever Biosensor for Detection of Ultrasmall Adsorbed Masses: Theory and Experiments

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