Femtosecond Laser-Based Modification of PDMS to Electrically Conductive Silicon Carbide

Nakajima, Yasuyuki; Hayashi, Shuichiro; Katayama, Akito; Nedyalkov, N.N.; Terakawa, Mitsuhiro

doi:10.3390/nano8070558

Cited by 29 publications

(18 citation statements)

References 25 publications

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“…6(d), lattice fringes with a spacing of approximately 0.25 nm were observed. This spacing corresponds to the (111) plane of b-SiC and, consistent with the previous reports by Nakajima et al, 17 the formation of crystalline SiC is indicated. Additionally, since the direction of the fringes is consistent throughout the observed monocrystalline structure, the observed structure is presumed to be a single nanoparticle of SiC.…”

Section: Tem Observation Of the Fabricated Structuresupporting

confidence: 91%

“…A laser power of 150 mW and scanning speed of 2 mm s À1 were selected for the fabrication of the line structure, since SiC with high crystallinity and high electrical conductivity was reported previously using these fabrication parameters. 17 SEM images of the surface show a signicant increase in surface roughness with laser irradiation ( Fig. 4(a)).…”

Section: Resultsmentioning

confidence: 99%

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Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane

2020

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Laser-based modification of polymer materials has been emerging as a versatile and efficient technique to simultaneously form and pattern electrically conductive materials. Recently, it has been revealed that native polydimethylsiloxane (PDMS) can be modified into electrically conductive structures using femtosecond laser irradiation; however, the details regarding the structures formed by this method have yet to be revealed. In this work, structures were fabricated by focusing and scanning femtosecond laser pulses onto the surface of PDMS. Raman Spectroscopy and Transmission Electron Microscopy (TEM) analyses revealed the formation of silicon carbide (SiC) nanocrystals, as well as multilayer graphitic carbon, in the modified regions of PDMS. The state of the formed material differed depending on the distance from the focal spot, suggesting that photo-thermal effects contributed to the degradation of PDMS into conductive material. Electrical conductivity measurements, in addition to Raman results, indicated that the amount of disorder in the formed graphitic carbon contributes to the electrical conductivity of the fabricated structures.

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Section: Tem Observation Of the Fabricated Structuresupporting

confidence: 91%

Section: Resultsmentioning

confidence: 99%

Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane

2020

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“…Such trenches are observed for all the structures previously fabricated by the laser modification of PDMS, regardless of the wavelength, pulse duration, power, and scanning speed during fabrication. [ 16–18 ] For the structure fabricated with a defocus distance of 50 μm, a similar but thinner trench can be observed (Figure 2b). In contrast, for the structures fabricated with defocus distances of 100 and 150 μm, no trenches are observed (Figure 2c,d).…”

Section: Resultsmentioning

confidence: 69%

“…[15] The laser modification of PDMS into electrically conductive structures has been recently demonstrated. [16][17][18] Using PDMS as a precursor, the realization of elastic PDMS-based flexible devices, without previously required transferring/coating or filler loading, can be expected. [19][20][21][22] However, the conductivities of the structures fabricated using PDMS as the precursor are significantly lower than those fabricated using other polymers, possibly due to the aliphatic structure of PDMS, which cannot be easily graphitized.…”

Section: Introductionmentioning

confidence: 99%

Laser Direct Writing of Highly Crystalline Graphene on Polydimethylsiloxane for Fingertip‐Sized Piezoelectric Sensors

2021

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The patterning of electrically conductive structures directly onto the polydimethylsiloxane (PDMS) surface is crucial for the realization of flexible and elastic devices. Herein, defocused femtosecond laser pulses are irradiated for the fabrication of highly crystalline graphitic carbon structures on PDMS and a high electrical conductivity of %51.6 S m À1 is achieved. Utilizing the elasticity of PDMS and the high conductivity of fabricated structures, a fingertip-sized pressure sensor, which can detect pressures as low as %0.1 Pa, is realized. Moreover, a novel ring-shaped heart rate (HR) monitor, capable of measuring the HR from the index finger, is demonstrated, indicating the potential of fabricated structures in miniature and wearable healthcare applications.

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“…This is in accordance with the lower abundance of Si atoms in the starting material due to the presence of 40% TEG. The presence of the nanoparticles is not surprising: laser‐induced synthesis of SiC nanoparticles from PDMS substrates has already been reported in the literature [ 16,18 ] and they are expected to play an important role in the electrical characteristics of the samples, lowering the conductivity of the material. Regarding the graphenized area, for both samples high‐resolution TEM images clearly show the presence of a complex structure of randomly oriented few‐layer graphene domains, characterized by the ≈3.4 Å d ‐spacing of the (002) family of planes in graphite.…”

Section: Resultsmentioning

confidence: 99%

Laser‐Induced Graphenization of PDMS as Flexible Electrode for Microsupercapacitors

Zaccagnini

Ballin

Fontana

et al. 2021

Adv Materials Inter

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flexible devices is still long and full of obstacles that strongly obstruct the development of such systems. [3] Among the main limitations, it is possible to observe that there is an urgency of effective strategies to obtain conductive paths onto flexible substrates. [4] Moreover, even if the flexibility is mandatory, stretchable substrates are even more desired since the portable device sector is moving toward a wearable configuration. This implies that it is not possible to keep flexibility and stretchability separated.In this context, laser induced graphene is emerging, in the large family of graphene-based materials, [5] as one of the most promising materials for the fabrication of flexible electronic devices. [6] However, despite the endless efforts spent to develop LIG on new substrates there is a lack of stretchable polymers suitable for laser graphenization. [7] Indeed, up to now the evidence of graphenization of elastomeric substrate has never been observed.Considering the family of elastomer polymers, polydimethylsiloxane (PDMS) represents the most popular elastomeric material in microsystem technology thanks to its attractive physical and chemical properties such as elasticity, optical transparency down to 220 nm, tunable surface chemistry, low water permeability but high gas permeability and high dielectric properties. Moreover, it is a cost-effective material and allows the development of reliable mass replication technique. [8] Unfortunately, it cannot be easily graphenized by direct laser writing because of the low amount of carbon linked to the siloxane chains, mainly consisting of methyl groups. For this reason, some research groups proposed the transfer of a LIG layer produced onto polyimide onto PDMS by simple infiltration of the uncured elastomer into the LIG network and subsequent peeling after the PDMS cross-linking. [9] This strategy allows to achieve stretchable electrodes, but strongly affects the conductivity of the transferred layer reducing its available surface area. [10] Moreover, the two-step process increases the fabrication time and complexity reducing the degrees of freedom during sample production.We recently proposed an easy way to overcome the abovementioned limitation by exploiting an innovative composite of polyimide microparticles dispersed into PDMS matrix. [11] The particles undergo a perfect graphenization during laser writing, but such procedure cannot solve all the problems previously discussed. In these composites the conductivity remains

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Femtosecond Laser-Based Modification of PDMS to Electrically Conductive Silicon Carbide

Cited by 29 publications

References 25 publications

Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane

Synthesis of silicon carbide nanocrystals and multilayer graphitic carbon by femtosecond laser irradiation of polydimethylsiloxane

Laser Direct Writing of Highly Crystalline Graphene on Polydimethylsiloxane for Fingertip‐Sized Piezoelectric Sensors

Laser‐Induced Graphenization of PDMS as Flexible Electrode for Microsupercapacitors

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