“…Ultrafast laser is a micro/nano processing tool with the advantages of a high precision, no mask requirement, controllability, and reproducibility 32,33 . Ultrafast lasers have been used to process micro/nanostructures, submicron patterns, and functional devices [34][35][36] , including supercapacitors 37,38 , photodetectors 39,40 , refractive index sensors 41 , optical encryption devices 42 , photoelectrodes 43 , memristors 44 , soft machinery 45 , and flexible sensors 46 . Owing to the ultrashort periods and ultrahigh energy intensities of ultrafast laser pulses, the interaction between ultrafast lasers and materials is a complex process involving energy deposition, transfer, structural transformation, plasma emission, and ablation at different temporal and spatial scales 47,48 .…”