Femtosecond laser direct fabrication of metallic microcantilevers for a micro-corrosion-fatigue test

Wang, Xinlin; Lu, Peixiang; Dai, Nengli; Liao, Changrui; Wang, Ying; Zheng, Qiguang; Guo, Xingpeng; Zhang, Qiang

doi:10.1088/0960-1317/17/7/013

Cited by 7 publications

(6 citation statements)

References 25 publications

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“…Like laser-based direct write methods, such as femtosecond laser ablation, 25 and laser decal transfer, 26 volatile liquidbased printing methods can employ a variety of materials, depending on the nature of the printing process and what is sought to be printed. 14,27 While either solution-or suspensionbased inks can be printed, these choices correspond to certain unique features and limitations in actual practice.…”

Section: Inkjet Printingmentioning

confidence: 99%

Recent developments and directions in printed nanomaterials

et al. 2015

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In this review, we survey several recent developments in printing of nanomaterials for contacts, transistors, sensors of various kinds, light-emitting diodes, solar cells, memory devices, and bone and organ implants. The commonly used nanomaterials are classified according to whether they are conductive, semiconducting/insulating or biological in nature. While many printing processes are covered, special attention is paid to inkjet printing and roll-to-roll printing in light of their complexity and popularity. In conclusion, we present our view of the future development of this field.

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Section: Inkjet Printingmentioning

confidence: 99%

Recent developments and directions in printed nanomaterials

et al. 2015

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“…Both polymeric [16,17] and metallic [18] microcantilevers were fabricated using lasers of different power and wavelengths. The main advantage of the laser micromachining method is its fast speed and low cost, enabling rapid prototyping for microcantilever sensor designs.…”

Section: Fig (2)mentioning

confidence: 99%

Microcantilever Biosensors: Probing Biomolecular Interactions at the Nanoscale

Li¹,

Shu

2011

COC

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Microcantilever based biosensors have attracted much attention as a label-free, real-time and highly sensitive approach to the detection of biomolecules. When specific biomolecular interactions occur between a receptor immobilized on one side of a cantilever and a target analyte in solution, a mechanical bending of the cantilever results due to a change in surface stress, thereby translating biochemical interactions into a concentration-dependent nanomechanical response of the microcantilevers. In this review, we present a general overview of the operation principles, fabrication and preparation of microcantilever biosensors and discuss their uses for a wide range of biosensing applications. The focus of the review is given to probing the biomolecular interactions at the solid-liquid interface by measuring the cantilever bending. In addition to the label-free detection of DNA, protein and cells, the emphasis is also made to discuss about the new development of microcantilever biosensors for label-free probing nanoscale conformational changes of DNA, protein and polymers, and real-time detection of nanomechanical forces from living cells. Finally, the outlook for future development work and challenges is also discussed.

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“…One of the other methods to fabricate the nanometres micro-cantilever array is laser micromachining the deposited material onto a silicon substrate. [2,3] Until now, the conventional image measurement technique for planar micro-structural properties of micro-cantilever on silicon <100> substrates have been studied. [6] However, the applicability of optical methods for microstructure arrays is established.…”

Section: Introductionmentioning

confidence: 99%

Step height measurement of surface-functionalized micro-machined micro-cantilever by scanning white light interferometry

Kurhekar

Apte

2013

Int Nano Lett

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Micro-cantilever arrays with different dimensions are fabricated by micro-machining technique onto a silicon <100> substrate. These sputtered gold-coated micro-cantilevers were later surface-functionalized. Scanning electron microscopy, atomic force microscopy (AFM), and optical diffraction using a laser source are employed to characterize the morphology and image measurement of the micro-cantilever arrays. The spatial resolution produced in the proposed image measurement method is approaching 1 μm, and the repeatable precision is nanometer confirmable. Compared with conventional AFM and SPM measurement techniques, the proposed method has demonstrated sufficient flexibility, repeatability, and reliability. The experimental results have been analyzed and presented in this paper for microelectromechanical system (MEMS) micro-cantilevers. The scanning white light interferometry-based two-point high-resolution optical method is presented for characterizing micro-cantilevers and other MEMS micro-structures. In this letter, we investigate the micro-structure fabrication and image measurement of length, width, and step height of micro-cantilever arrays fabricated using bulk micro-machining technique onto a silicon <100> substrate.

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Femtosecond laser direct fabrication of metallic microcantilevers for a micro-corrosion-fatigue test

Cited by 7 publications

References 25 publications

Recent developments and directions in printed nanomaterials

Recent developments and directions in printed nanomaterials

Microcantilever Biosensors: Probing Biomolecular Interactions at the Nanoscale

Step height measurement of surface-functionalized micro-machined micro-cantilever by scanning white light interferometry

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