Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams

Wetzel, Benjamin; Xie, Chen; Lacourt, Pierre-Ambroise; Dudley, John M.; Courvoisier, F.

doi:10.1063/1.4846415

Cited by 55 publications

(48 citation statements)

References 26 publications

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“…Another study employed a 100 fs Ti:Sa laser to evaluate changes in channels width with laser fluence. Micro and nanodisks in single layer graphene were also fabricated using vortex Bessel beams of a femtosecond laser under a different number of exposures . Producing graphene folds was also reported in another study by Ti:Sa laser ablation .…”

Section: Introductionmentioning

confidence: 73%

“…To exploit these properties of graphene in the miniaturized devices, controlled patterning of graphene films is essential as the performance of the devices highly depends on the quality of the produced patterns. Laser patterning is an attractive technique to do so and the laser parameters can be easily adjusted to obtain high quality patterns …”

Section: Introductionmentioning

confidence: 99%

“…Due to these remarkable properties, graphene has been widely employed in various fields such as electrodes, high-performance transistors, supercapacitors, and spintronics in order to overcome the limitations facing in current devices. [1][2][3][4][5][6][7][8][9][10] However, practical applications using graphene still have many challenges. To exploit these properties of graphene in the miniaturized devices, controlled patterning of graphene films is essential as the performance of the devices highly depends on the quality of the produced patterns.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Evaluating Single Layer Graphene Micropatterns Induced by Ti:Sa Laser Irradiation

Mortazavi

Mollabashi

Barri

et al. 2018

Phys. Status Solidi A

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Due to the unique optical and electrical properties of graphene and its potential application in microelectronics and spintronics, precise micropatterning graphene on substrates has found significant attention for optimal performance of many these applications. This study investigates the process of patterning single layer graphene on a SiO2/Si substrate using Ti:Sa laser irradiation. A variety of laser fluences are employed for the removal of graphene from the substrate surface as the film is scanned at different speeds and required laser fluences for the removal of graphene are determined at these speeds. This is performed because pulse overlapping is an effective parameter for successful removal of graphene from substrates, which results in different ablation thresholds for each laser scanning speed. Changes of produced channels widths are also investigated as a function of total laser fluences. Study of Raman spectra of patterned graphene film is performed by Raman microspectroscopy to evaluate the quality of laser produced micropatterns. It includes the investigations of intensity changes of defect D and D′ bands on graphene edge. Optical contrasts are also calculated for both graphene and graphene edge and the results are compared.

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Section: Introductionmentioning

confidence: 73%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Evaluating Single Layer Graphene Micropatterns Induced by Ti:Sa Laser Irradiation

Mortazavi

Mollabashi

Barri

et al. 2018

Phys. Status Solidi A

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“…1(a) and 2. The nondiffracting property has been further employed in many applications, such as nonlinear filamentation control [10][11][12][13][14][15], laser machining [16][17][18], and particle trapping and guiding [19].…”

Section: Introductionmentioning

confidence: 99%

Light trajectory in Bessel–Gauss vortex beams

et al. 2015

Self Cite

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We investigate the early stage of propagation of Bessel-Gauss vortex beams where a transition regime shows a progressive lateral expansion of the main intensity ring before reaching a diffraction-free regime. The eikonal equation is used to characterize the beam structure. The beam is featured by a family of hyperboloids with variable waists, generating a tapered tubular caustic. Our analytical results are in excellent agreement with numerical and experimental results. We show the transition regime can be well eliminated by using hollow input beams.

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“…Femtosecond laser ablation has been used for a broad range of micromachining processes including surface nanotexturing [16,17] and nanostructuring [18][19][20][21], hole drilling [22,23], 3D micro-object machining [24][25][26], 3D metal nanoparticle structuring [27], and surface coloration [28]. Prior research has been focused on modification of surface morphology and characteristics [16][17][18][19][20][21] and structuring of thin films [27,[29][30][31].…”

Section: Introductionmentioning

confidence: 99%

Precise machining of disk shapes from thick metal substrates by femtosecond laser ablation

Park

Farson

2015

Int J Adv Manuf Technol

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Femtosecond-pulsed lasers have proven to be versatile for machining of microscale features in a variety of materials with minimal residual stress and heat-affected zone. However, machining of components from 200-μm-thick metal substrates by femtosecond laser ablation requires repetitive scanning of the laser beam focus along multiple adjacent paths numerous times to completely remove the part. In this study, optimization of multi-pass ablation parameters for efficient cutting and optimum final shape accuracy of disks of Stellite, aluminum, and stainless steel was investigated. The ablation depth of Stellite was measured with different pulse energies and groove widths, and 200 μm of diameter and thickness of Stellite disk were machined. The tapered cross-section of the disk was observed and increased pulse energy as the laser beam approached the bottom of the sample helped to minimize the taper angle of the sides of the disk. Moreover, the comparison of ablation depth in Stellite, aluminum, and stainless steel were conducted with various pulse energies and groove widths.

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Femtosecond laser fabrication of micro and nano-disks in single layer graphene using vortex Bessel beams

Cited by 55 publications

References 26 publications

Evaluating Single Layer Graphene Micropatterns Induced by Ti:Sa Laser Irradiation

Evaluating Single Layer Graphene Micropatterns Induced by Ti:Sa Laser Irradiation

Light trajectory in Bessel–Gauss vortex beams

Precise machining of disk shapes from thick metal substrates by femtosecond laser ablation

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