2012
DOI: 10.1117/12.908671
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Femtosecond laser hyperdoping and micro/nanotexturing of silicon for photovoltaics

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Cited by 4 publications
(3 citation statements)
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“…To obtain flat hyperdoped silicon using ultrafast laser irradiation, no more than approximately 10 pulses per site may be applied (larger pulse densities produce textures) [57,58]. The resulting dopant concentrations are typically in the range of 0.01–0.1 at.-%, peaking at the surface and decreasing to undetectable levels at depths of 10–100 nm [51,57].…”
Section: Ultrafast Laser Hyperdopingmentioning
confidence: 99%
“…To obtain flat hyperdoped silicon using ultrafast laser irradiation, no more than approximately 10 pulses per site may be applied (larger pulse densities produce textures) [57,58]. The resulting dopant concentrations are typically in the range of 0.01–0.1 at.-%, peaking at the surface and decreasing to undetectable levels at depths of 10–100 nm [51,57].…”
Section: Ultrafast Laser Hyperdopingmentioning
confidence: 99%
“…optoelectronics [3][4][5][6][7][8][9]. One of the most promising and effective approaches to further extend the optical absorption of Si to the mid-and far-infrared ranges consists of introducing deep-level dopants (transition metals and chalcogens) into the Si bandgap at concentrations in excess of the solid solubility limit [10][11][12][13][14][15]. This leads to the formation of an intermediate band (IB) that allows for the strong room-temperature optical absorption of photons with energy lower than the Si band-gap.…”
Section: Introductionmentioning
confidence: 99%
“…Specimens were irradiated by nanosecond laser pulses. To improve the material quality and thus device performance, thermal annealing and chemical etching after ultrafast texturing were performed on Si [17,18].…”
Section: Introductionmentioning
confidence: 99%