Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide

Maia, João M.; Amorim, Vítor A.; Viveiros, Duarte; Marques, P. V. S.

doi:10.1038/s41598-021-88682-x

Cited by 12 publications

(8 citation statements)

References 39 publications

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Section: Waveguide Materials For Fsdlwmentioning

confidence: 99%

“…In addition to the basic waveguide structure, Maia et al. [ 127 ] reported a monolithic lab‐on‐a‐chip fabricated by Fs‐laser micromachining, which is entirely made of fused silica and consists of a microdisk resonator integrated inside a microfluidic channel (Figure 6g). The surface roughness of the device can be reduced to the nanometer level by thermal annealing, thereby reducing the waveguide losses and maintaining a high Q‐factor of 10 5 .…”

Section: Waveguide Materials For Fsdlwmentioning

confidence: 99%

See 1 more Smart Citation

Optical Waveguides Fabricated via Femtosecond Direct Laser Writing: Processes, Materials, and Devices

Cao

Qiu

et al. 2023

Adv Materials Technologies

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As the most fundamental unit of photonic integration, optical waveguides offer the possibility of developing efficient and practical photonic chips by facilitating the on‐chip integration of devices with different functions. Femtosecond direct laser writing (FsDLW), as a burgeoning 3D microfabrication technology, can realize the rapid formation of arbitrary optical waveguides without any mask inside versatile materials, such as crystalline dielectric crystals, glasses, polymers, and photoresists. This significant material‐independence allows FsDLW to combine different materials and manufacturing processes to implement a cross‐platform solution. This review first describes the different optical loss types and suitable measurement methods for different applicable scenes, then summarizes the two fabrication mechanisms and points out the general direction for adjusting the waveguide properties by fabrication processes. Finally, the application fields and development prospects of different materials are discussed by overviewing the characteristics of different materials and the material selection preferences of different devices. With a panoramic view of the development, it is concluded with insights and perspectives of the future development of optical waveguides and processing technology via FsDLW.

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Section: Waveguide Materials For Fsdlwmentioning

confidence: 99%

Section: Waveguide Materials For Fsdlwmentioning

confidence: 99%

Optical Waveguides Fabricated via Femtosecond Direct Laser Writing: Processes, Materials, and Devices

Cao

Qiu

et al. 2023

Adv Materials Technologies

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“…The development of high-Q devices is a challenge for researchers. An example of a disk resonator in which whispering gallery modes (WGM) are excited through a WG coupling (a WG with a small gap from the disk) is given in [ 354 ]. The structure is tested with Cargille fluids (series AA) for n range from 1.296 to 1.363 at 1550 nm.…”

Section: Label-free Optical Techniques Of Protein Detection Quantific...mentioning

confidence: 99%

Label-Free Physical Techniques and Methodologies for Proteins Detection in Microfluidic Biosensor Structures

et al. 2022

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Proteins in biological fluids (blood, urine, cerebrospinal fluid) are important biomarkers of various pathological conditions. Protein biomarkers detection and quantification have been proven to be an indispensable diagnostic tool in clinical practice. There is a growing tendency towards using portable diagnostic biosensor devices for point-of-care (POC) analysis based on microfluidic technology as an alternative to conventional laboratory protein assays. In contrast to universally accepted analytical methods involving protein labeling, label-free approaches often allow the development of biosensors with minimal requirements for sample preparation by omitting expensive labelling reagents. The aim of the present work is to review the variety of physical label-free techniques of protein detection and characterization which are suitable for application in micro-fluidic structures and analyze the technological and material aspects of label-free biosensors that implement these methods. The most widely used optical and impedance spectroscopy techniques: absorption, fluorescence, surface plasmon resonance, Raman scattering, and interferometry, as well as new trends in photonics are reviewed. The challenges of materials selection, surfaces tailoring in microfluidic structures, and enhancement of the sensitivity and miniaturization of biosensor systems are discussed. The review provides an overview for current advances and future trends in microfluidics integrated technologies for label-free protein biomarkers detection and discusses existing challenges and a way towards novel solutions.

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“…The specific resonance frequencies are influenced by external factors such as temperature, pressure or ambient gas. A change in these factors leads to a shift in the resonance frequency, allowing these structures to be used in optical sensing applications [2][3][4][5] . Other possible applications of microresonators range from optical telecommunications [6][7][8] to quantum technology [9][10][11] .…”

Section: Introductionmentioning

confidence: 99%

Selective laser-induced etching for novel 3D microphotonic devices

Beckmann,

Bi,

Thoms

et al. 2024

Laser-Based Micro- And Nanoprocessing XVIII

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In this work, we evaluate the advantages and limitations of the Selective Laser-induced Etching (SLE) process for the fabrication of novel three-dimensional microresonator structures. Microresonators are resonant optical structures with the ability to store light of a specific wavelength. They are used as non-linear optical components, in sensors or even in integrated photonic devices. These structures are characterized by the optical quality factor Q as a measure of the optical storage capabilities. Q is significantly influenced by a high-quality optical surface with low surface roughness. In addition to surface quality and small dimensions, from tens of microns to millimeters, high optical nonlinearity is a key requirement in these fields. The fabrication of 3D fused silica parts fulfilling these requirements is an ongoing challenge in the field of microfabrication in quantum technology. The SLE process is used to fabricate three-dimensional parts of transparent materials such as fused silica with a high degree of geometric freedom in a two-step process. In the first step, a model of the part is written into the material using ultrashort pulse (USP) laser radiation. In the second step, the laser-written shape is wet-chemically etched in aqueous KOH to expose the part. The fabrication of 2D disk microresonators with high Qfactors is evaluated by studying the surface roughness of the SLE process followed by polishing. The polished samples are characterized and Q-factors >10 7 are achieved. In addition, the extent to which dimensions and geometry differ between design and real SLE components is analyzed. The SLE process will thus be investigated as a possible process for the future fabrication of three-dimensional microresonators.

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Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide

Cited by 12 publications

References 39 publications

Optical Waveguides Fabricated via Femtosecond Direct Laser Writing: Processes, Materials, and Devices

Optical Waveguides Fabricated via Femtosecond Direct Laser Writing: Processes, Materials, and Devices

Label-Free Physical Techniques and Methodologies for Proteins Detection in Microfluidic Biosensor Structures

Selective laser-induced etching for novel 3D microphotonic devices

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