Femtosecond laser microstructuring: an enabling tool for optofluidic lab‐on‐chips

Osellame, Roberto; Hoekstra, H.J.W.M.; Cerullo, Giulio; Pollnau, Markus

doi:10.1002/lpor.201000031

Cited by 290 publications

(232 citation statements)

References 127 publications

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“…However, the FLAE method suffers from low fabrication precision, on the order of 10 mm, determined by the wet etching process. 29 To compensate for this weakness and achieve more functional microchips, we have recently demonstrated TPP integration of 3D polymer devices into 3D glass microchannels prepared by FLAE using hybrid femtosecond laser microfabrication. 30 The fabricated microchips are called ship-in-a-bottle biochips and have been used for successive filtering, mixing and synthesizing.…”

Section: Introductionmentioning

confidence: 99%

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Niu

et al. 2015

Light Sci Appl

123

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The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1-5 mm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (.three times) focal length and imaging of the characters 'RIKEN' in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

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Section: Introductionmentioning

confidence: 99%

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Niu

et al. 2015

Light Sci Appl

123

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“…(1) or that in Eq. (2) will have an influence on the nonlinear energy deposition by spreading the intensity distribution along its range.…”

Section: Channel Formation and Focusing Effectmentioning

confidence: 99%

“…Several substrate materials including silicon, glass and polymers are used for LOC fabrication. However, glass is still the material of choice for many applications due to its chemical inert, stable in time, hydrophilic, nonporous, optically clear, and easily supports electro-osmotic flow [1]. Currently, fabrication of microfluidic devices still heavily relies on photolithographic techniques, which require multilayer and multistep processing procedures to form 3D microstructures.…”

Section: Introductionmentioning

confidence: 99%

Single step channeling in glass interior by femtosecond laser

Kongsuwan

Wang

Yao

2012

Journal of Applied Physics

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Channeling inside a transparent material, glass, by femtosecond laser was performed by using a single step process rather than hybrid processes that combine the laser irradiation with an additional tool or step to remove the material. Tightly focusing of a single femtosecond laser pulse using proper optical and laser processing parameters could induce the microexplosion and could create voids inside transparent materials, and the effects of these parameters on the resultant feature geometry and channel length were studied. Understanding of the channel length variation at different locations from the specimen surface could enhance prediction capability. Taking into account of the laser, material, and lens properties, numerical models were developed to predict the absorption volume shape and size at different focusing depths below the surface of a specimen. These models will also be validated with the variation in feature and channel lengths inside the specimen obtained from the experiments. Spacing between adjacent laser pulses and laser parameters were varied to investigate effects of channel overlapping and its influence on long channel formation.

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“…[12][13][14][15][16] By tightly focusing a femtosecond laser beam in dielectric materials such as glass and crystals, the interior of the material can be modified in a space-selective manner through multiphoton absorption. This technique therefore provides an ideal solution for integrating multifunctional microcomponents in a single chip, such as a microresonator integrated with a microheater which allows rapid tuning of the resonant wavelength.…”

Section: Introductionmentioning

confidence: 99%

On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

Tang

Lin

Song

et al. 2015

International Journal of Optomechatronics

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We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 lm away from the microresonator, has a footprint size of 200 lm Â 400 lm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.

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Femtosecond laser microstructuring: an enabling tool for optofluidic lab‐on‐chips

Cited by 290 publications

References 127 publications

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Single step channeling in glass interior by femtosecond laser

On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

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