“…MD simulation has been widely applied in the study of nanomachining process. It can simulate the nanoscale processing of many materials, like Cu [Zhang, 2011], Ge [Ji and Zhang, 2013], Si [Renke and Zhuji, 2006] and glasses [Liang et al, 2007;Pedone et al, 2008;Nath, 2013;Kilymis and Delaye, 2013]. They investigated the nanoscale processing, mechanical properties and surface modification though radiation of those materials, providing important support for ultra-precision machining.…”