2020
DOI: 10.1088/2631-7990/abb5f3
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Femtosecond laser shockwave peening ablation in liquids for hierarchical micro/nanostructuring of brittle silicon and its biological application

Abstract: This paper presents a new technique, termed femtosecond laser shock peening ablation in liquids (fs-LSPAL), which can realize simultaneous crack micro/nanomanufacturing and hierarchical micro/nanolaser ablation, giving rise to the formation of diverse multiscale hierarchical structures, such as macroporous ratcheted structures and en échelon microfringes decorated with parabolic nanoripples. Through analysis of surface morphologies, many phenomena have been confirmed to take place during fs-LSPAL, including en… Show more

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Cited by 33 publications
(19 citation statements)
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“…Owing to the invention of the laser system by Maiman [10] in 1960 and its continuous innovation with a milestone of chirped pulse amplification, ultrashort lasers with high powers and short pulse durations and increasingly low prices have become accessible to researchers, which open up many avenues for material processing, such as laser cutting [11], laser functional structuring [12][13][14][15][16], laser machining [17], laser cross-linking [18], 3D/4D laser printing [19][20][21], additive manufacturing [22], and laser patterning [23,24]. Unlike laser additive manufacturing and laser printing techniques that are aimed to construct 3D or 4D structures from smaller-scale building blocks, laser ablation is a subtractive manufacturing technique with micro/nanomaterials as the subtractive materials [11,25].…”
Section: Introductionmentioning
confidence: 99%
“…Owing to the invention of the laser system by Maiman [10] in 1960 and its continuous innovation with a milestone of chirped pulse amplification, ultrashort lasers with high powers and short pulse durations and increasingly low prices have become accessible to researchers, which open up many avenues for material processing, such as laser cutting [11], laser functional structuring [12][13][14][15][16], laser machining [17], laser cross-linking [18], 3D/4D laser printing [19][20][21], additive manufacturing [22], and laser patterning [23,24]. Unlike laser additive manufacturing and laser printing techniques that are aimed to construct 3D or 4D structures from smaller-scale building blocks, laser ablation is a subtractive manufacturing technique with micro/nanomaterials as the subtractive materials [11,25].…”
Section: Introductionmentioning
confidence: 99%
“…The topological structure modification for implants has been developed greatly in recent years, and lots of studies have been conducted to produce biocompatibility or antibacterial surface on implants [ 14 ]. The implants need to have both good biocompatibility and antibacterial property in clinical applications.…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, UPLA/P is capable of surface structuring of a large variety of materials including metals, ceramics, semiconductors, dielectrics, polymers, and two-dimensional materials 17−27 , which involve hard-to-treat materials 26 . Recent UPLA/P innovations have unveiled that new factors such as electric and magnetic fields 28,29 , high-pressure shockwave 30 , and persistent bubbles 18,31 generated during UPLA/P or exerted externally may become new keys to manipulate structure morphologies. Despite the success in generating new types of structures at different scales, it is still challenging to further enrich the structural diversity and unveil the underlying key factors that cause the differences.…”
Section: Introductionmentioning
confidence: 99%