Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

Corbari, C.; Champion, Audrey; Gecevičius, Mindaugas; Beresna, Martynas; Bellouard, Yves; Kazansky, Peter G.

doi:10.1364/oe.21.003946

Cited by 60 publications

(35 citation statements)

References 29 publications

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“…This model further estimates that the stress around individual lamellae can be in the order of several GPa. Such high stress may locally create the conditions for crack nucleation and the collapse of the nanogratings structure resulting in stress relaxation phenomena as suggested in [14,16]. Note that the occurrence of cracks inside nanogratings lamellae, were observed experimentally in [16].…”

Section: Polarization Effects On Accumulated Stressmentioning

confidence: 76%

“…To overcome this limitation, we enlarge the span of the stressed region using a dedicated laser-written pattern (shown in Fig. 2) suggested in [14] that we use here for a different purpose than it was initially designed for. In this pattern, several lines, forming an edge, are written one on top of another along the z-axis, and through the entire thickness T of the specimen.…”

Section: Methodsmentioning

confidence: 99%

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Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

Champion¹,

Beresna²,

Kazansky³

et al. 2013

Opt. Express

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Under certain exposure conditions, femtosecond lasers create nanogratings in the bulk of fused silica for which the orientation is governed by the laser polarization. Such nanostructure induces stress that affects optical and chemical properties of the material. Here, we present a method based on optical retardance measurement to quantify the stress around laser affected zones. Further, we demonstrate stress dependence on the nanogratings orientation and we show that the stress within single nanogratings lamellae can locally be as high as several gigapascals.

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Section: Polarization Effects On Accumulated Stressmentioning

confidence: 76%

Section: Methodsmentioning

confidence: 99%

Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

Champion¹,

Beresna²,

Kazansky³

et al. 2013

Opt. Express

Self Cite

View full text Add to dashboard Cite

show abstract

Section: Resultsmentioning

confidence: 97%

“…The lower retardance values (typically below 150 nm) observed for repetition rates higher than 100 kHz (as shown in [21,22]) could be explained by thermal accumulation that deteriorates the "quality" of the nanogratings. These become disrupted as can be observed on SEM images in Figure 1a, in agreement with [22]. Finally, using the following set of parameters 1030 nm, 300 fs, 0.6 NA, 100 kHz, 100-500 μm/s, 1-2.5 μJ/pulse and with the quantitative birefringence measurements, we confirm the successful realization of a very high retardance of about 350 nm (100 μm/s, 2.5 μJ/pulse) at λ ~ 546 nm wavelength-this is the highest reported value in the literature using this direct writing technique.…”

Section: Resultsmentioning

confidence: 97%

Compact Birefringent Waveplates Photo-Induced in Silica by Femtosecond Laser

et al. 2014

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Recently, we showed that femtosecond laser induced "nanogratings" consist of thin regions with a low refractive index (Δn = −0.15), due to the formation of nanoporous silica surrounded by regions with a positive index change. In this paper, we investigate a wide range of laser parameters to achieve very high retardance within a single layer; as much as 350 nm at λ = 546 nm but also to minimize the competing losses. We show that the total retardance depends on the number of layers present and can be accumulated in the direction of laser propagation to values higher than 1600 nm. This opens the door to using these nanostructures as refined building blocks for novel optical elements based on strong retardance.

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“…Generally, the etching is performed with diluted hydrofluoric acid (HF), which was successfully applied in fabrication of micro-channels, and tunnels [3,[9][10][11][12][13][14][15] or more complex structures [8,[16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Tailored surface birefringence by femtosecond laser assisted wet etching

Drevinskas¹,

Gecevičius²,

Beresna³

et al. 2015

Opt. Express

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Surface texturing is demonstrated by the combination of wet etching and ultrafast laser nanostructuring of silica glass. Using potassium hydroxide (KOH) at room temperature as an etchant of laser modified glass, we show the polarization dependent linear increase in retardance reaching a threefold value within 25 hours. The dispersion control of birefringence by the etching procedure led to achromatic behaviour over the entire visible spectral range. The mechanism of enhanced KOH etching selectivity after femtosecond laser exposure is discussed and correlated to the formation of various laser-induced defects, such as silicon-rich oxygen deficiency and color centers.

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Femtosecond versus picosecond laser machining of nano-gratings and micro-channels in silica glass

Cited by 60 publications

References 29 publications

Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation

Compact Birefringent Waveplates Photo-Induced in Silica by Femtosecond Laser

Tailored surface birefringence by femtosecond laser assisted wet etching

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