We report effects of rapid thermal annealing on nanostructure, texture, and magnetic properties of granular FePt:Ag films. It was found that the orientations of FePt grains were dependent strongly on the as-deposited multilayer structure and the annealing processes. Through the control of the annealing processes, ͑001͒ textured L1 0 granular FePt:Ag films were obtained. Magnetic measurements revealed that saturation magnetization M s , perpendicular coercivity H c , and remanence ratio M r /M s , were also dependent on the annealing temperature, annealing time and Ag content. Perpendicular H c values increased from 1.5 to 15 kOe when the annealing temperature changed from 400 to 600°C for 600 s. Perpendicular H c values remained about 11 kOe when the annealing time changed from 5 to 600 s. The effect of Ag content on magnetic properties is reported.