We report the first study of optical-emission properties associated with interface-state formation for metals on III-V semiconductor surfaces. Cathodoluminescence spectroscopy reveals discrete levels distributed over a wide energy range and localized at the microscopic interface. Our results demonstrate the influence of the metal, the semiconductor, and its surface morphology on the energy distributions. Evolution of spectral features with interface formation, particularly above monolayer metal coverage, is correlated with Fermi-level movements and Schottky-barrier heights. PACS numbers: 78.60.Hk, 73.30. +y r 73.40.NsThe identification of interface states and their role in Schottky-barrier formation have long been key issues in the understanding of electronic properties of metal/ semiconductor (SC) junctions. 1 For clean, ordered InP or GaAs (110), intrinsic gap surface states are absent, and a few monolayers of deposited metal create new charge states which stabilize the Fermi level (E F ) in a limited range within the band gap. 2 Considerable spectroscopic evidence suggests that chemical effects (e.g., reaction and interdiffusion) take place concurrently which promote localized charge formation. Physical models for the localized charge states which influence metal/compound-SC contact rectification vary from gap states due to defects formed by metal atom condensation, 3 to metal-induced gap states defined by the SC band structure, 4 to chemisorption and charge transfer involving metals atoms and clusters, 5 to chemically formed dipole layers 6 and effective work functions of interface alloys. 7 Nevertheless, except for isolated absorption studies of surface and interface states by total internal reflection 8 or surface photovoltage spectroscopy 9 and near-edge photoluminescence of mechanically damaged surfaces, 10 the presence and energies of interface states have been inferred largely from measurements of capacitance, 1,11 current, 1,12 and E F movement 2 -5Here we report the most direct observation of metal/SC interface states thus far. We have detected luminescence from interface states by means of cathodoluminescence spectroscopy 13 (CLS), a technique common to bulk studies and recently applied to laserannealed metal/SC interfaces 14 and to GaAs/GaAlAs multilayer structures. 15 We have characterized the formation and evolution of interface states with metal deposition on ultrahigh-vacuum-cleaved (110) III-V SC surfaces of submonolayers up to several monolayers, where the metallic state of the overlayer is well defined. We show that dramatic changes are produced in the optical emission properties of III-V SC's upon metal deposition, both broad and discrete emission bands at energies below the band gap. Our studies reveal the influence of the particular metal, the SC, its morphology, and its bulk growth quality on the spectral distribution. Furthermore, the evolution of electron-excited optical emission spectra of metal/InP or GaAs interfaces shows qualitative differences at submonolayer versus multilayer meta...