Ferroelectric and piezoelectric thin films and their applications for integrated capacitors, piezoelectric ultrasound transducers and piezoelectric switches

Klee, M.; Boots, H. M. J.; Kumar, B.; Heesch, C. van; Mauczok, R.; Keur, W.; Wild, Marco de; Esch, H. Van; Roest, Aarnoud L.; Reimann, K.; Leuken, Linda van; Wunnicke, O.; Zhao, Jinyan; Schmitz, Georg; Mienkina, Martin P.; Mleczko, Michal J.; Tiggelman, M.P.J.

doi:10.1088/1757-899x/8/1/012008

Cited by 10 publications

(6 citation statements)

References 8 publications

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“…Significantly higher sound pressure outputs were demonstrated by the group of Klee, in which it was shown that it is possible to generate clinically relevant levels of sound from thin film piezoelectric transducers [37]. They were also able to demonstrate focusing as well as imaging.…”

Section: Transducer Characterizationmentioning

confidence: 95%

Medical Applications of Piezoelectric Microelectromechanical Systems

Griggio

Kim

Ural

et al. 2013

Integrated Ferroelectrics

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Bulk piezoelectric ceramics and single crystals are widely used in medical applications, including medical ultrasonic imaging, therapeutic ultrasound, and drug delivery. This paper reviews possibilities for thin film micromachined components as alternatives to the bulk devices. Particular emphasis is placed on the development of a CMOScompatible ultrasound system. For this purpose, a piezoelectric ultrasound system on a Si substrate was fabricated using a diaphragm geometry transducer with PZT films. A 1-D array of 8 elements was designed and fabricated using 4 photolithography steps. Cavities under the resonating elements were obtained by XeF 2 etching from the top-side of the wafer. Capacitance and admittance spectra showed a resonance at ∼ 42 MHz for the fabricated structures with a quality factor of 2.1, this resonance was higher than the one predicted by the natural frequency equation for circular plate. Catch-and pitch-mode tests were performed in water. Sensing and actuating functionalities were demonstrated for the fabricated devices, with collected signals of 40 mV peak-to-peak at a distance of 7.2 mm during the catch-mode test and amplitudes as high as 15 mV peak-to-peak at a distance of 7.4 mm during the pitch-mode test. A bandwidth of 83% was calculated during pitch-mode test.

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Section: Transducer Characterizationmentioning

confidence: 95%

Medical Applications of Piezoelectric Microelectromechanical Systems

Griggio

Kim

Ural

et al. 2013

Integrated Ferroelectrics

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“…Many of these problems can potentially be overcome by micromachined ultrasound transducers (MUTs). The MUT family includes capacitive micromachined ultrasonic transducers (CMUTs) based on the flexural vibrations caused by a field-induced electrostatic attraction between suspended membrane and the substrate ( Figure 1 b) [ 20 , 21 , 22 , 23 , 24 , 25 ], and piezoelectric micromachined ultrasonic transducers (PMUTs) based on flexural vibrations caused by d 31 ‑ [ 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 ] or d 33 ‑mode [ 39 , 40 , 41 ] excitation of a piezoelectric membrane ( Figure 1 c).…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Qiu

Gigliotti

Wallace

et al. 2015

Sensors

306

198

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Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

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“…The aim of this research area is to provide clean energy attending the needs of the world in the fight against pollution. Conventional ferroelectric materials such as lead zirconate titanate (PZT) [JAFFE 1969, REN 2003, KLEE 2010, modified lead titanate [WANG 2000, CHU 2004, PONTES 2001 and ferroelectric polymers [LOVINGER 1983, KAWAI 1969, BAUER 2000 have been used in applications which use either piezo or pyroelectric properties. Concerned to the…”

Section: Introductionmentioning

confidence: 99%