“…Recently, BST thin films have been prepared by several techniques such as pulsed laser deposition (PLD) [4,9], radio-frequency (RF) magnetron sputtering [8,10,11], sol-gel [8,12], metal-organic chemical vapor deposition (MOCVD) and etc [13,14]. It is well known that RF magnetron sputtering is one of the promising methods for BST film deposition due to its high quality of prepared ferroelectric films and easy process control [8,11].…”