Abstract:Lead strontium zirconate titanate (Pb0.92Sr0.08)(Zr0.65Ti0.35)O3 (PSZT) thin films were grown on Pt (111)/Ti/SiO2/Si(100) substrates using a simple sol-gel method. X-ray diffraction studies confirmed that all the PSZT films undergone various thermal process show highly preferred (001)-orientation. On the surface image of the thin film, many clusters are found, which are composed by grains in size of 0.5-0.8 mm. Between the clusters, the nano-size grain is about 50-80 nm. The root mean square (RMS) roughness of… Show more
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