“…In order to optimize the performance of thin films, it is essential to understand those factors that may influence the properties of ferroelectric thin films. Our previous studies have shown that the polarization behavior of polycrystalline PZT thin films greatly depends on preferred orientation, monoclinic phase and associated residual stress [11][12][13]. For example, the 300 nm thick Pb(Zr 0.52 Ti 0.48 )O 3 film exhibits higher remnant polarization value than that of the 200 nm thick PZT film [12].…”