“…However, different results were presented by different groups, and the inconsistent results in DMSs might be due to sensitive dependence on fabrication methods and process conditions, such as substrates, temperature, oxygen pressure, etc. Recently, the physical mechanism of the high-temperature ferromagnetism in the oxide DMSs was mainly focused on the following respects: (1) oxygen vacancies, such as in the (Co, Fe, Cu)-TiO 2 and Fe-HfO 2 systems [16][17][18][19]; (2) structural defects, such as in the Cr-TiO 2 and Ni-SnO 2 systems [20][21][22][23][24], whose physical picture is not clear till now; (3) charge carriers, such as in the epitaxial Co-TiO 2 films [25,26]. In this paper, we fabricated the polycrystalline Co-doped TiO 2 films at different sputtering gas pressure using reactive facing-target sputtering.…”