The effects of 3He irradiation on the inhomogeneity in the anisotropy-field magnitude, Δ90, the angular dispersion, α90, and the coercive force, Hc, have been examined for vacuum-deposited thin Premalloy films, with compositions ranging between 43% and 83% nickel. The changes induced in these parameters were developed at 60°C by exposing the films to 2 MeV 3He irradiation, in the presence of a 500 Oe orienting magnetic field applied parallel to the easy-axis directions of the films. The total dosage received by the films was 2×1017 particles/cm2. As a result of this exposure, the values for both α90 and Δ90 decreased for all compositions, with the decrease a minimum in the vicinity of 78% nickel. Similarly, the coercive force decreased for most compositions, but was insensitive to irradiation for compositions around 81% nickel. Decreases in α90, Δ90, and Hc. were as much as 46% for some compositions; however, much of the decrease in Δ90 was primarily the result of an irradiation-induced increase in the average uniaxial anisotropy field, Hk. On the basis of these results it was concluded that the irradiation induces an over-all decrease in the internal strain in the film.