The ferromagnetism in Mn(6 nm)/X(0.5 nm)/Si(6 nm) (X ¼ B, BN, B 4 C,SiC) trilayers was investigated. The as-deposited trilayers did not exhibit ferromagnetism, but the trilayers annealed around 700 K did exhibit ferromagnetism at 77 K. The annealed Mn/B 4 C/Si trilayer has a Curie temperature above 300 K. The Mn/B/Si, Mn/BN/Si and Mn/SiC/Si trilayers have Curie temperatures around 260 K. q