FIB Overview

Park, Chris; Avishai, Amir; Pan, David Z.; Lewis, Brett B.; Buxbaum, Alex

doi:10.31399/asm.tb.mfadr7.t91110335

Microelectronics Failure Analysis 2019

DOI: 10.31399/asm.tb.mfadr7.t91110335

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FIB Overview

Chris Park¹,

Amir Avishai²,

David Z. Pan³

et al.

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2022

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Rapid high-resolution volumetric imaging via laser ablation delayering and confocal imaging

Phoulady

May

Choi

et al. 2022

Sci Rep

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Acquiring detailed 3D images of samples is needed for conducting thorough investigations in a wide range of applications. Doing so using nondestructive methods such as X-ray computed tomography (X-ray CT) has resolution limitations. Destructive methods, which work based on consecutive delayering and imaging of the sample, face a tradeoff between throughput and resolution. Using focused ion beam (FIB) for delayering, although high precision, is low throughput. On the other hand, mechanical methods that can offer fast delayering, are low precision and may put the sample integrity at risk. Herein, we propose to use femtosecond laser ablation as a delayering method in combination with optical and confocal microscopy as the imaging technique for performing rapid 3D imaging. The use of confocal microscopy provides several advantages. First, it eliminates the 3D image distortion resulting from non-flat layers, caused by the difference in laser ablation rate of different materials. It further allows layer height variations to be maintained within a small range. Finally, it enables material characterization based on the processing of material ablation rate at different locations. The proposed method is applied on a printed circuit board (PCB), and the results are validated and compared with the X-ray CT image of the PCB part.

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Rapid high-resolution volumetric imaging via laser ablation delayering and confocal imaging

Phoulady

May

Choi

et al. 2022

Sci Rep

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show abstract

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FIB Overview

Cited by 1 publication

References 49 publications

Rapid high-resolution volumetric imaging via laser ablation delayering and confocal imaging

Rapid high-resolution volumetric imaging via laser ablation delayering and confocal imaging

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