Fiber-based temperature microsensor by using three-dimensional photomask

Abstract

In this paper we present a new three-dimensional (3D) photomask technology for the direct fabrication of temperature microsensors on tiny fiber substrates. The 3D photomask consists of an exposure module having two half-pipe substrates with the outer and inner diameters of 1.8 and 0.32 mm, respectively, which have fine patterns of thin Cr metal film. Using the 3D photomask, two resistive temperature microsensors of thin Pt metal film including wiring pads are successfully and directly fabricated on different sides of the same quartz capillary with the outer and inner diameters of 300 and 180 µm, respectively. The minimum pattern width of the temperature microsensors is about 10 µm. The as-prepared temperature microsensors have shown excellent linear response to the variations in of temperature from 25 to 80 °C. It indicates that the fiber based temperature microsensor could be expected in many applications in biomedical devices.