Fiber Bragg grating sensor for in situ substrate temperature measurement in a magnetron sputtering system

Raju, S.D.V.S. Jagannadha; Haque, S. Maidul; Goud, B Karthik; De, Rajnarayan; Misal, J. S.; Rao, K. Divakar

doi:10.1088/1402-4896/ac850f

Cited by 6 publications

(3 citation statements)

References 19 publications

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“…To achieve a better fit between fiber and metal materials, the bare fiber needs to be surface-metallized to deposit a conductive layer before electroplating. Currently, the primary methods of fiber surface metallization include magnetron sputtering [122][123][124] , vacuum evaporation deposition [125] , and electroless plating [126] . In electroplating, the metallized optical fiber and the plated pure metal are used as cathode and anode, respectively, so that the metal cations in the solution are deposited on the surface of the optical fiber to form the plating layer.…”

Section: Electroplatingmentioning

confidence: 99%

Recent advances in optical fiber high-temperature sensors and encapsulation technique [Invited]

å¾�,

å�ž,

æ¢�

et al. 2023

Chin. Opt. Lett.

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In the aerospace field, for aerospace engines and other high-end manufacturing equipment working in extreme environments, like ultrahigh temperatures, high pressure, and high-speed airflow, in situ temperature measurement is of great importance for improving the structure design and achieving the health monitoring and the fault diagnosis of critical parts. Optical fiber sensors have the advantages of small size, easy design, corrosion resistance, anti-electromagnetic interference, and the ability to achieve distributed or quasi-distributed sensing and have broad application prospects for temperature sensing in extreme environments. In this review, first, we introduce the current research status of fiber Bragg grating-type and Fabry-Perot interferometer-type high-temperature sensors. Then we review the optical fiber hightemperature sensor encapsulation techniques, including tubular encapsulation, substrate encapsulation, and metalembedded encapsulation, and discuss the extreme environmental adaptability of different encapsulation structures. Finally, the critical technological issues that need to be solved for the application of optical fiber sensors in extreme environments are discussed.

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Section: Electroplatingmentioning

confidence: 99%

Recent advances in optical fiber high-temperature sensors and encapsulation technique [Invited]

å¾�,

å�ž,

æ¢�

et al. 2023

Chin. Opt. Lett.

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“…Owing to their small size, easy integration, electrical isolation, multiplexing and immunity to electromagnetic interference, the optical fiber sensors, especially, the fiber Bragg grating (FBG) sensors have received extensive attention in practical applications [10][11][12][13]. In addition, due to processing good strain-sensitive properties, the FBG was also employed to monitor the bolt.…”

Section: Introductionmentioning

confidence: 99%

A tailless FBG smart bolt with excellent performance

Li,

Zheng,

Hou

et al. 2024

Preprint

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The existing smart bolts based on fiber Bragg grating (FBG) have limitations, such as with long tail fibers and without satisfactory repeatability (R-squared value < 0.990), these limit their further application. Here, a tailless FBG smart bolt with excellent repeatability (R-squared value ≥ 0.999) that can simultaneously measure the strain and temperature through the design of the integrated FBG sensor is developed. A theoretical approach is employed to derive the linear relationship between the applied torque and the central wavelength of the tailless FBG smart bolt. The integrated FBG sensor embedded in the tailless FBG smart bolt, includes the temperature compensated FBG and strain measured FBG. In addition, a nominal strength of M24 bolt is redesigned. To enable the experimental study, the tailless FBG smart bolt is designed, fabricated and tested. Experimental results reveal the good linear relationship between the applied torque and the central wavelength of the integrated FBG sensor, which demonstrate that this tailless FBG smart bolt is suitable for the axial forces monitoring and the bolt looseness monitoring.

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“…Though uneven substrate temperature has been attributed for lateral non-uniformity in thin films [9], the temperature distribution has never been measured with a motive to predict the uniformity in thin films prior to actual deposition. Fiber Bragg grating (FBG) based temperature sensors [17] have been employed in this work to measure substrate temperature distribution. The temperature measurement using FBG in plasma environment does not get affected by the presence of charges in plasma.…”

Section: Introductionmentioning

confidence: 99%

In-situ optimization of lateral film uniformity in PVD system by using Fiber Bragg grating temperature sensors

Haque,

Jagannadha Raju,

Kumar

et al. 2024

Phys. Scr.

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Fiber Bragg grating (FBG) based temperature sensing method has been employed in this work for measuring the lateral temperature distribution on substrate plane during pulse DC magnetron sputtering deposition for optimization of lateral film uniformity. The evolution of temperature distribution with the variation of important process parameters like pulse width (496–1616 ns), deposition pressure (3.1 × 10−3–1.9 × 10–2 mbar) and sputtering power (25–250 W) have been measured over 40 mm radial distance on glass substrate horizon. To investigate the effect of substrate height on the temperature distribution, the later has been measured at two different substrate heights (60 mm and 90 mm) for varying sputtering power. Finally, the effect of variation in temperature distribution on uniformity of thickness and optical, morphological and structural properties have been investigated by separately depositing two HfO2 thin films at two representative extreme deposition powers (75 W and 200 W). The correlation of film non-uniformity of the above properties with the temperature distribution suggests that FBG based multipoint temperature sensing can be possibly used as an indicative tool for in situ optimization of the lateral film uniformity. In addition, the fast response and workability in plasma environment of FBG sensors enables precise in situ mapping of temperature distribution in sputtering process.

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Fiber Bragg grating sensor for in situ substrate temperature measurement in a magnetron sputtering system

Cited by 6 publications

References 19 publications

Recent advances in optical fiber high-temperature sensors and encapsulation technique [Invited]

Recent advances in optical fiber high-temperature sensors and encapsulation technique [Invited]

A tailless FBG smart bolt with excellent performance

In-situ optimization of lateral film uniformity in PVD system by using Fiber Bragg grating temperature sensors

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