Fiber profilometer for measurement of hard-to-access areas

Abstract

A fiber profilometer is developed to measure hard-to-access areas. This system utilizes low coherence light interferometry technique to detect profiles of internal surfaces of samples. A differentiation method is employed to enhance vertical resolutions of imaging results. An auto-focusing scheme is proposed to obtain an optimized lateral resolution. The performance of the profilometer system is demonstrated by experimental studies.

Surface roughness measurement by depolarization method

“…The stability of a fiber profilometer can be improved by using the common-path technique [2]. Disturbances are reduced by differentiation of sample reflection and probe reflection.…”

“…With a raster scanning, the surface profile could be constructed from heights of each lateral position. A detailed description can be found from our previous publication [2].…”

“…Fiber-based profilometers comprise one group of noncontact technique for measurement of hard-to-access areas of industrial work pieces [1,2]. There is a commercial fiber profilometer for surface measurement provided by Novacam.…”