Field emission and lifetime of microcavity plasma

Kim, G.J.; Iza, Felipe; Lee, Jae Koo

doi:10.1063/1.3068745

Cited by 9 publications

(3 citation statements)

References 39 publications

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“…Radio-frequency sources need somewhat lower voltages, but require close control to avoid transitions between operating modes, some of which may be destructive [3]. The dc sources are simple to operate but prone to sputter erosion of the cathode material [5].…”

Section: Introductionmentioning

confidence: 99%

Stable linear plasma arrays at atmospheric pressure

Hoskinson

Hopwood

2011

Plasma Sources Sci. Technol.

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A non-thermal microplasma has been intensively investigated because of its ability to generate high electron densities with low gas temperatures, even at atmospheric pressure. This work demonstrates linear arrays of microplasmas generated in atmospheric pressure argon driven by a series of microstrip resonators. Small arrays of such resonators were previously shown to sustain up to five microplasmas, but intrinsically weak coupling between resonators is shown to be insufficient to form wider uniform arrays. An electrical connection between each resonator is shown to enhance the coupling among resonators, allowing arrays composed of at least 88 elements that extend 11 cm in width. The application of coupled-mode theory to this system shows good agreement with measurements of microplasma emission intensity as well as with electromagnetic simulations of these devices. Operation of arrays at microwave frequencies allows a nearby ground electrode to participate in the resonance. These findings may allow for future low-cost plasma processing using roll-to-roll techniques at pressures of one atmosphere.

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Section: Introductionmentioning

confidence: 99%

Stable linear plasma arrays at atmospheric pressure

Hoskinson

Hopwood

2011

Plasma Sources Sci. Technol.

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“…However, simulations of microwave breakdown suggest that field emission will begin to play a role with gap sizes of 50 μm and less [33,34]. With field emission, it may be possible not only to lower breakdown voltage requirements but also to increase electron density for a given voltage [35,36]. Although simulations have shown the possibility of field emission assisting breakdown [33][34][35][36], there has been no reported experimental evidence for field-emission in microwave microplasma generators.…”

Section: Introductionmentioning

confidence: 99%

“…With field emission, it may be possible not only to lower breakdown voltage requirements but also to increase electron density for a given voltage [35,36]. Although simulations have shown the possibility of field emission assisting breakdown [33][34][35][36], there has been no reported experimental evidence for field-emission in microwave microplasma generators. Therefore, experimentation with small gap-spacing in microwave microplasma generators is of interest in this work.…”

Section: Introductionmentioning

confidence: 99%

Weibull analysis of atmospheric pressure plasma generation and evidence for field emission in microwave split-ring resonators

Cohick

Hall²,

Wolfe

et al. 2020

Plasma Sources Sci. Technol.

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The generation of atmospheric pressure microplasmas using microwave resonators is promising for many applications due to the possibility of high electron densities and low electrode degradation. In particular, such plasmas may help enable reconfigurable metamaterials operating from GHz to THz. Since plasma metamaterials may require the generation of tens to hundreds of plasmas, it is important to find ways to reduce the power required for plasma breakdown. Here, we study gold and silver microwave split-ring resonators (SRRs) with a variety of materials near the interelectrode gap (Cu, CuO nanowires, aluminum oxide). We focus on those fabricated using a traditional thick film technique, screen-printing, and using fs-and ns-laser ablation. The use of laser ablation allows us to explore small interelectrode gap sizes (7-100 μm) and the use of different lasers and laser parameters enables us to produce a variety of microstructures. We utilize Weibull statistics to examine breakdown in atmospheric pressure Ar with and without deep ultraviolet illumination of SRRs. Fabrication methods and materials are shown to influence both Q-factor of the SRRs and breakdown voltage independently. It is found that superior performance in terms of breakdown voltage and consistency in breakdown is related to Weibull modulus. The power requirement for breakdown varied as widely as an order of magnitude depending on fabrication method and material used for the SRRs. Furthermore, we consider the performance differences seen between various resonators and relate this to microstructure/ material which suggests that field-emission may play a role in providing the seed electrons required for breakdown. This need for seed electrons appears to be especially important for gap sizes of 40 μm and smaller.

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