Field Evaporation of Carbonaceous Materials in Laser-Assisted Atom Probe (Effects of the Laser Wavelength and Power)

Kajiwara, Yoshio; Hanaoka, Yoko; Mayama, Norihito; Iwata, Tatsuya; Taniguchi, Masateru; Owari, Masanori

doi:10.1380/ejssnt.2010.217

Cited by 2 publications

(2 citation statements)

References 16 publications

(13 reference statements)

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“…This was attributed to competition between the thermal energy and photon energy during field evaporation of arsenic and phosphorus. In our previous study, we reported that the ionization efficiency of an organic sample depends on the photon energy [11]. The lower detection efficiency observed on the shadow side in the current work was likely due to field evaporation that was influenced only by temperature, and that evaporation of neutral species also proceeded.…”

Section: Estimation Of Temperature Distribution Between Irradiation Smentioning

confidence: 45%

Evaluation of Detection Efficiency of Atom Probe Tomography

Morita

Karasawa

Asaka

et al. 2014

JSA

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Atom probe tomography (APT) is a widely used technique to evaluate the atomic structure of semiconductor materials such as the field effect transistor. However, application of the APT technique faces difficulties, among which is the low reliability of reconstruction calculations due to poor understanding of the field evaporation mechanism. In general, lower detection efficiencies are observed in low evaporation field elements that undergo DC evaporation in APT. However, in the analysis of SiO 2 and GaAs, the detection efficiencies of oxygen and arsenic are higher than those of silicon and gallium, even though oxygen and arsenic have higher evaporation fields. To explain these phenomena, we evaluated the potential for neutral desorption from the sample surface without ionization in the APT analysis. We observed changes in the detection efficiencies of arsenic and phosphorus during analysis of InGaAsP, when the laser power and initial temperature were varied. This was attributed to increases in the temperature of the surface atoms during irradiation of the pulsed laser. Therefore, under the ultrahigh vacuum conditions applied in the experiment, the low vapor pressure elements might have experienced sublimation.

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Section: Estimation Of Temperature Distribution Between Irradiation Smentioning

confidence: 45%

Evaluation of Detection Efficiency of Atom Probe Tomography

Morita

Karasawa

Asaka

et al. 2014

JSA

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“…[4,5] In our previous report, generation of carbon cluster ions depended on both laser power and wavelength. [6] In this study, CNT and highly oriented pyrolytic graphite (HOPG) were analyzed by 3DAP. HOPG was analyzed as an alternative of graphene.…”

Section: Introductionmentioning

confidence: 99%

Atomic structure analysis of carbonaceous material by laser‐assisted 3DAP

Morita

Hanaoka

Mayama

et al. 2012

Surface & Interface Analysis

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Carbonaceous materials such as carbon nanotubes (CNT) and graphene attract attention as new large scale integration materials from various characteristics. The analysis of atomic scale structure requires high spatial resolution and high detection efficiency when it is integrated as a real device. Therefore, we analyzed these materials by laser-assisted three-dimensional atom probe. However, in the case of analyzing organic materials, there are some problems: carbon cluster ions are generated at field evaporation, the focused ion beam process of needle-shape sample is difficult, and so on. Moreover, the field evaporation of CNT occurs toward unfavorable direction. In this study, we propose the improvement of the focused ion beam processing. We evaluated the measurement condition to reduce carbon cluster ions. And the field evaporation of CNT is simulated for obtaining appropriate measurement condition. In the results section, the ideal needle-shape sample was prepared, and the wavelength dependence of the field evaporation was confirmed. Moreover, it revealed that it was important to change the distance between the specimen apex and the local electrode in the three-dimensional atom probe analysis of CNT.

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Field Evaporation of Carbonaceous Materials in Laser-Assisted Atom Probe (Effects of the Laser Wavelength and Power)

Cited by 2 publications

References 16 publications

Evaluation of Detection Efficiency of Atom Probe Tomography

Evaluation of Detection Efficiency of Atom Probe Tomography

Atomic structure analysis of carbonaceous material by laser‐assisted 3DAP

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