Filter-based control for parallel plate micro electrostatic actuators

Abstract

Abstract-In this paper, a filter-based nonlinear control strategy for parallel-plate micro electrostatic actuators is designed. The proposed control technique utilizes the measurements of the micro actuator's movable plate displacement and the device internal charge. The information of the micro actuator's movable plate velocity is utilized as well in the control synthesis but since it is difficult to be measured, filtered signals are designed and utilized to facilitate the control development. A Lyapunov-based analysis is presented which proves that a desired time-varying displacement of the micro actuator's movable plate is accurately tracked. The proposed nonlinear controller is capable of controlling the movable plate beyond the pull-in boundary that is one third of the capacitive gap. Representative numerical simulations are introduced to demonstrate the performance of the proposed filter-based nonlinear control strategy in accurately tracking the deflection of the micro electrostatic movable plate within the entire capacitive gap. Finally, a comparison with a standard PID controller is also presented to demonstrate the effectiveness of the proposed control design.

An Improved Passivity-based Control of Electrostatic MEMS Device

“…A linearization method was deployed in some works, as in [ 6 ], while in others nonlinear control techniques were proposed, such as static and dynamic sliding mode control [ 7 ], backstepping control [ 8 , 9 ], and differential flatness [ 10 ]. Nonlinear control approaches based on the passivity-based control of MEMS have also been reported in the literature.…”

An output feedback LPV control strategy of a nonlinear electrostatic microgripper through a singular implicit modeling

“…To deal with the side instability, linear and nonlinear control approaches have been proposed. They are based on input/output linearization (Maithripala et al [2003]), differential flatness (Zhu et al [2005]), backstepping (Salah et al [2010]) or robust PID (Vagia et al [2008]). Recent works demonstrated the interest of Linear Parameter Varying (LPV) controllers to deal with this non-linearity (Shirazi et al [2011]; Alwi et al [2012]).…”