Filtering performance improvement in V-doped ZnO/diamond surface acoustic wave filters

Luo, Jingting; Zeng, Fei; Pan, Feng; Li, H.F.; Niu, Jiebin; Jia, Rui; Liu, M.

doi:10.1016/j.apsusc.2009.11.077

Cited by 45 publications

(5 citation statements)

References 28 publications

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“…Piezoresponse is the key property to determine the insertion loss and K 2 of ZnO based SAW filters. We used ZnO:V films with enhanced piezoresponse as the piezoelectric material to fabricate high frequency diamond SAW filters and undoped ZnO films were used as contrastive device [143].…”

Section: Filtering Performance Improvement In Zno:v/ Diamond Surface mentioning

confidence: 99%

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

Pan

Luo

Yang

et al. 2011

Sci. China Technol. Sci.

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In recent years, with the growing concerns on environmental protection and human health, new materials, such as lead-free piezoelectric materials, have received increasing attention. So far, three types of lead-free piezoelectric systems have been widely researched, i.e., perovskites, bismuth layer-structured ferroelectrics, and tungsten-bronze type ferroelectrics. This article presents a new type of environmental friendly piezoelectric material with simple structure, the transition-metal(TM)-doped ZnO. Through substituting Zn 2+ site with small size ion, we obtained a series of TM-doped ZnO with giant piezoresponse, such as Zn 0.975 V 0.025 O of 170 pC/N, Zn 0.94 Cr 0.06 O of 120 pC/N, Zn 0.913 Mn 0.087 O of 86 pC/N and Zn 0.988 Fe 0.012 O of 127 pC/N. The tremendous piezoresponses are ascribed to the introduction of switchable spontaneous polarization and high permittivity in TM-doped ZnO.The microscopic origin of giant piezoresponse is also discussed. Substitution of TM ion with small ionic size for Zn 2+ results in the easier rotation of noncollinear TM-O1 bonds along the c axis under the applied field, which produces large piezoelectric displacement and corresponding piezoresponse enhancement. Furthermore, it proposes a general rule to guide the design of new wurtzite semiconductors with enhanced piezoresponses. That is, TM-dopant with ionic size smaller than Zn 2+ substitutes for Zn 2+ site will increase the piezoresponse of ZnO significantly. Finally, we discuss the improved performances of some TM-doped ZnO based piezoelectric devices.

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Section: Filtering Performance Improvement In Zno:v/ Diamond Surface mentioning

confidence: 99%

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

Pan

Luo

Yang

et al. 2011

Sci. China Technol. Sci.

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“…As the rapid development of mobile communication, especially in the arrival of the fifth-generation (5G) wireless system, the perfect integration of the Internet of Things, cloud computing, big data, and artificial intelligence represents the general trend [1][2][3][4]. Therefore, the devices that make up the 5G wireless system are faced with challenges of miniaturization, low-power consumption, and good compatibility with the integrated circuitry [5][6][7][8][9]. Surface acoustic wave (SAW) devices have become the mainstream implementation of radio frequency (RF) filters in modern mobile transceivers because the SAW devices can fully meet the above requirements in terms of certain components of the wireless system.…”

Section: Introductionmentioning

confidence: 99%

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

Huang

Shuai

et al. 2023

Electronics

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This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor.

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“…One promising solution to fabricate high-frequency SAW devices is to utilize layered SAW structure with ZnO or AlN piezoelectric films deposited onto high-velocity substrates, such as sapphire, SiC and diamond [7][8][9][10]. SiC, in particular, is rather suitable as an acoustic substrate for SAW applications due to its high acoustic velocity, low propagation loss and availability in large-size single-crystal wafer [11].…”

Section: Introductionmentioning

confidence: 99%

High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO₂/SiC structure

Lu¹,

Fu²,

Chen³

et al. 2020

J. Phys. D: Appl. Phys.

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The explosive growth of wireless communication and the creation of new frequency bands for 5G systems increasingly require surface acoustic wave (SAW) with high operating frequency (i.e. 3–6 GHz) as well as high-temperature stability. In this work, high-frequency and high-temperature stable SAW devices using ZnO/SiO2/SiC layered structures were proposed and reported. SAW characteristics of the Sezawa wave mode, including the phase velocities (Vp), electromechanical coupling coefficients (K2) and temperature coefficient of frequency (TCF), were studied systematically by the finite element method. High-frequency SAW one-port resonators with the resonant frequency ranging from ∼4.5–5.4 GHz were fabricated on the above structures. With SiC substrate providing high velocity and SiO2 interlayer for temperature compensation, a 5.0 GHz and nearly zero TCF of 0.7 ppm °C−1 can be achieved in a SAW device based on ZnO/SiO2/SiC structure. The good performance of these devices demonstrates that the ZnO/SiO2/SiC structure is promising for high-frequency and good temperature-stability SAW device applications.

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Filtering performance improvement in V-doped ZnO/diamond surface acoustic wave filters

Cited by 45 publications

References 28 publications

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO₂/SiC structure

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Filtering performance improvement in V-doped ZnO/diamond surface acoustic wave filters

Cited by 45 publications

References 28 publications

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

Giant piezoresponse and promising application of environmental friendly small-ion-doped ZnO

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO2/SiC structure

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Product

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High-frequency and high-temperature stable surface acoustic wave devices on ZnO/SiO₂/SiC structure