Fine cleaning of dust from gaseous process media by granular filters with a connected layer structure

Abstract

Advantages of granular filters with a connected layer structure over alternative means of ultrafine fine removal of mechanical impurities from gaseous process media are examined. Specific structural solutions for these vessels, and their operating parameters in the production of electronic devices, in biotechnology, during the production of electrolytic hydrogen, and in cryogenic engineering are presented. Methods are recommended for regeneration of multilayer filtering structures. Information on commercial and socioeconomic prospects of granular filters with a connected layer structure, which are employed for the fine removal of mechanical impurities from gaseous process media, are presented in the bibliography.Granular filters with a connected layer structure are widely used in various branches of industry; this is dictated by the availability of filtering material, the possibility of operation with marked variation in the physicochemical parameters of the dust-gas flow, entirely adequate efficiency, heat and corrosion resistance, high mechanical strength of the filtering elements, and the possibility of using various means of regeneration [1][2][3][4].These filters are effective for use, for example, in the electronic industry, where the functioning of miniature devices with very small gaps and tolerances may be disrupted when particles of dust, nap, organic substances, and various aggressive gases fall onto critical elements of a device. The reliability of miniature components of electronic devices is ensured by stringent cleanliness of initial materials and gaseous process media, rational structural shaping, and process hygiene [4]. The permissible size of dust particles and their number in an air medium will depend on the character and design of the device, its power parameters, and the distances (gaps, tolerances) between components. If a gap of 1 µm is specified between components of a microcircuit, no particles more than 0.3 µm in size should exist in the air medium. Particles, whose dimensions are smaller than the limiting size also present a risk, since may form conglomerates [5].In fact, the requirements of establishments manufacturing high-precision devices are more stringent, since their operation is disrupted when dust particles 0.3, and even 0.1 µm in size collect on their surfaces. Many production processes