Fine-Pitch Copper Wiring Formed with Super-Inkjet and Oxygen Pump

Shirakawa, Naoki; Murata, Kazuhiro; Kajihara, Yasukazu; Nakamura, Katsuhiro; Kashiwagi, Yukiyasu; Nakamoto, Masami; Sato, Hiroo; Kojima, Toshifumi; Komiya, Daisuke; Shimizu, Kotaro; Masuda, Kazuyuki

doi:10.7567/jjap.52.05db19

Cited by 14 publications

(11 citation statements)

References 11 publications

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“…3 shows examples of suitable samples prepared under controlled humidity. Micro-patterning devices could also be used to place CG particles around biological targets 33 . Our method is compatible with droplets of samples ejected from a liquid jet injector 34 if CG is added to the sample solution.…”

Section: Discussionmentioning

confidence: 99%

Signal enhancement and Patterson-search phasing for high-spatial-resolution coherent X-ray diffraction imaging of biological objects

Takayama

Maki-Yonekura

Oroguchi

et al. 2015

Sci Rep

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In this decade coherent X-ray diffraction imaging has been demonstrated to reveal internal structures of whole biological cells and organelles. However, the spatial resolution is limited to several tens of nanometers due to the poor scattering power of biological samples. The challenge is to recover correct phase information from experimental diffraction patterns that have a low signal-to-noise ratio and unmeasurable lowest-resolution data. Here, we propose a method to extend spatial resolution by enhancing diffraction signals and by robust phasing. The weak diffraction signals from biological objects are enhanced by interference with strong waves from dispersed colloidal gold particles. The positions of the gold particles determined by Patterson analysis serve as the initial phase, and this dramatically improves reliability and convergence of image reconstruction by iterative phase retrieval. A set of calculations based on current experiments demonstrates that resolution is improved by a factor of two or more.

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Section: Discussionmentioning

confidence: 99%

Signal enhancement and Patterson-search phasing for high-spatial-resolution coherent X-ray diffraction imaging of biological objects

Takayama

Maki-Yonekura

Oroguchi

et al. 2015

Sci Rep

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“…We have previously found that repeated oxidization in air and reduction in low p(O 2 ) can produce printed copper wiring of fairly low resistivity [3]. Although the resistivity could become under 10 μΩ·cm, the grains hardly grew from the original nanoparticles (see Fig.…”

Section: N Shirakawamentioning

confidence: 99%

“…Although the resistivity could become under 10 μΩ·cm, the grains hardly grew from the original nanoparticles (see Fig. 6 in [3]). …”

Section: N Shirakawamentioning

confidence: 99%

The secret of Cool Plasma Sintering for low-temperature bulk formation from copper nanoparticles

Shirakawa

2016

2016 International Conference on Electronics Packaging (ICEP)

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We have developed a new, highly effective method of sintering copper wiring printed in copper nanoparticle inks. Here extremely low oxygen partial pressure necessary for copper oxide reduction is provided by an oxygen pump and atmospheric pressure plasma is used to facilitate grain growth. We have achieved grain growth from 15 nm to about 300 nm at 180 degrees Celsius. The resultant metal is void free and has low 2.6 microhm cm resistivity, close to 1.7 microhm cm for bulk. We have named this process CPS (Cool Plasma Sintering).

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“…If the viscosity of the ink is too high, the ink cannot be loaded to the tip of the nozzle. The metal nanoparticle conductive inks have been intensively printed high-density circuitry for a MEMS Device 80 , source/drain electrodes in OFETs 79 and other electronics applications, such as resistive fuse-type write-once-readmany (WORM) memory 78 , metallization of the through silicon vias 84 and mm-wave bandpass filter 82 . The low viscosity of the ink mentioned above was typically in the range of 5 20 mPa•s, and the resolution reached 2 μm.…”

Section: ∼ ∼mentioning

confidence: 99%

An overview on the principle of inkjet printing technique and its application in micro-display for augmented/virtual realities

Yang¹,

Lin²,

Wu³

et al. 2022

OEA

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Augmented reality (AR) and virtual reality (VR) are two novel display technologies that are under updates. The essential feature of AR/VR is the full-color display that requires high pixel densities. To generate three-color pixels, the fluorescent color conversion layer inevitably includes green and red pixels. To fabricate such sort of display kits, inkjet printing is a promising way to position the color conversion layers. In this review article, the progress of AR/VR technologies is first reviewed, and in succession, the state of the art of inkjet printing, as well as two key issues -the optimization of ink and the reduction of coffee-ring effects, are introduced. Finally, some potential problems associated with the color converting layer are highlighted.

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Fine-Pitch Copper Wiring Formed with Super-Inkjet and Oxygen Pump

Cited by 14 publications

References 11 publications

Signal enhancement and Patterson-search phasing for high-spatial-resolution coherent X-ray diffraction imaging of biological objects

Signal enhancement and Patterson-search phasing for high-spatial-resolution coherent X-ray diffraction imaging of biological objects

The secret of Cool Plasma Sintering for low-temperature bulk formation from copper nanoparticles

An overview on the principle of inkjet printing technique and its application in micro-display for augmented/virtual realities

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