FinFET SCR: Design challenges and novel fin SCR approaches for on-chip ESD protection

Paul, Milova; Kumar, Brijesh; Ruß, Christian; Gossner, Harald; Shrivastava, Mayank

doi:10.23919/eosesd.2017.8073437

Cited by 11 publications

(4 citation statements)

References 5 publications

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“…In as much as these findings verify the sluggish diffusion hypotheses, Paul [64] raised several concerns-hinting at possible errors in diffusion calculations presented by Tsai et al [57] They had estimated diffusion coefficients using conventional means based on a quasibinary approach. [57] In their response, Tsai et al [65] pointed out that Paul's idea [64] behind a similar diffusion behavior in quasibinary and binary couples being identical was flawed. They argued that minor nontarget element diffusion exists in many alloy systems and thus, it is almost impossible to have a single interdiffusion coefficient.…”

Section: Sluggish Diffusion Effectmentioning

confidence: 70%

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

et al. 2020

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Increasing demand for improved physical, chemical, and mechanical properties led to the development of conventional alloys from single elements. These conventional alloys are made by selecting one or two major elements with desired properties, and other minor components are added to tune the properties to meet performance specifications. The conventional alloy design strategy is mainly based on the "solutesolvent" principle. However, another alloy design strategy based on multiprincipal elements in the near-equimolar ratio has recently been developed. In this multiprincipal element system, it is difficult to distinguish between the solute and the solvent, and various atoms are supposed to be randomly distributed in the crystal lattices (which has not been confirmed yet). This strategy, proposed by Yeh [1] and Cantor, [2] was based on the Boltzmann hypothesis of the relationship between entropy and system complexity. They proposed that the increased configurational entropy of mixing in alloys with multiple alloying elements in near-equiatomic proportions would overcome the enthalpy of compound formation, stabilizing solid solutions (SS) at the expense of intermetallics (IMs) during solidification. These multiprincipal element alloys are named "high entropy alloys" (HEAs), although the exact values of entropy in HEAs have not been experimentally measured yet. Since then, hundreds of HEAs with different combinations have been developed based on transition metals, refractory metals, and compound forming elements. [2-20] Most of these HEAs have been found to possess simple crystal structures such as the face-centered cubic (fcc) Fe-Co-Cr-Mn-Ni HEAs, [2] bodycentered cubic (bcc) Al-Co-Cr-Fe-Ni HEAs, [18] and the hexagonal close-pack (hcp) Ho-Dy-Y-Gd-Tb HEAs [6] when solidified from the melts. Experimental characterization techniques such as X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), differential scanning calorimetry (DSC), nanoindentation, tensile, wear-and corrosionresistance tests have been used to study the microstructureproperties correlations of HEAs. [3-50] These studies have revealed that HEAs possess superior properties, such as high hardness and strength, [23-29] superior corrosion and wear resistance, [3,30-35] good magnetic properties, [9,36-39,51] structural stability, [7,40,41] attractive mechanical properties at extreme temperature conditions, [21,42-47] and good electronic properties. [48,49] Yeh [50] proposed four core effects of HEAs, namely: 1) high-entropy effect; 2) sluggish diffusion effect; 3) sever lattice distortion effect; and 4) cocktail effect, in which the lattice distortion might be the key factor affecting the properties of HEAs. Although a complete understanding of lattice distortions in HEAs is still not established yet, significant progress in HEAs has been made recently.

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Section: Sluggish Diffusion Effectmentioning

confidence: 70%

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

et al. 2020

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“…[5][6][7] Both the existence and the underlying principles of this core effect are still under hot debate. [2][3][4][5][6][7][8][9][10] Our results of vacancies diffuse with a strong memory effect, spending unequal time in different sites, and hopping back and forth frequently between pairs of sites should provide an excellent picture to understand the sluggish diffusion. Our finding that vacancies actively hop between different lattice sites, but get trapped in small local regions, making some particles only move in small local regions, should be a new way to understand the sluggish diffusion and a new phenomenon worth researchers in HEAs looking for.…”

Section: High-entropy Alloymentioning

confidence: 99%

“…[ 1 ] Theorists are also aware that understanding the vacancy dynamics of HEAs can help us to understand its most controversial core effect, [ 2 , 3 , 4 ] the sluggish diffusion effect. [ 5 , 6 , 7 , 8 , 9 , 10 ] As vacancy‐like defects have recently been shown to be important in glassy systems, [ 11 , 12 , 13 , 14 , 15 ] the study of vacancy dynamics sounds useful in both crystalline and amorphous materials.…”

Section: Introductionmentioning

confidence: 99%

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Heterogeneity and Memory Effect in the Sluggish Dynamics of Vacancy Defects in Colloidal Disordered Crystals and Their Implications to High‐Entropy Alloys

et al. 2022

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Vacancy dynamics of high-density 2D colloidal crystals with a polydispersity in particle size are studied experimentally. Heterogeneity in vacancy dynamics is observed. Inert vacancies that hardly hop to other lattice sites and active vacancies that hop frequently between different lattice sites are found within the same samples. The vacancies show high probabilities of first hopping from one lattice site to another neighboring lattice site, then staying at the new site for some time, and later hopping back to the original site in the next hop. This back-returning hop probability increases monotonically with the increase in packing fraction, up to 83%. This memory effect makes the active vacancies diffuse sluggishly or even get trapped in local regions. Strain-induced vacancy motion on a distorted lattice is also observed. New glassy properties in the disordered crystals are discovered, including the dynamical heterogeneity, the presence of cooperative rearranging regions, memory effect, etc. Similarities between the colloidal disordered crystals and the high-entropy alloys (HEAs) are also discussed. Molecular dynamics simulations further support the experimental observations. These results help to understand the microscopic origin of the sluggish dynamics in materials with ordered structures but in random energy landscapes, such as high-entropy alloys.

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Contact and junction engineering in bulk FinFET technology for improved ESD/latch-up performance with design trade-offs and its implications on hot carrier reliability

Paul

Kumar

Gossner

et al. 2018

2018 IEEE International Reliability Physics Symposium (IRPS)

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FinFET SCR: Design challenges and novel fin SCR approaches for on-chip ESD protection

Cited by 11 publications

References 5 publications

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

Heterogeneity and Memory Effect in the Sluggish Dynamics of Vacancy Defects in Colloidal Disordered Crystals and Their Implications to High‐Entropy Alloys

Contact and junction engineering in bulk FinFET technology for improved ESD/latch-up performance with design trade-offs and its implications on hot carrier reliability

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