Finishing procedure for high-performance synchrotron optics

Schindler, Axel; Haensel, Thomas; Nickel, Andreas; Thomas, Hans-Juergen; Lammert, Heiner; Siewert, Frank

doi:10.1117/12.506505

Cited by 35 publications

(15 citation statements)

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“…[22][23][24] The spatial resolution achievable by slope measuring deflectometry is of special importance, mainly in the case when topography data are used to simulate the performance of optical components 25,26 or when deterministic surface finishing is applied to remove residual figure deviations. [27][28][29] For such use, a precise spatial frequency calibration is essential. In past publications, it was proposed to characterize such devices with dedicated test samples of periodic and chirped profiles.…”

Section: Introductionmentioning

confidence: 99%

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Siewert

Zeschke

Arnold

et al. 2016

Review of Scientific Instruments

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Slope measuring deflectometry is commonly used by the X-ray optics community to measure the long-spatial-wavelength surface figure error of optical components dedicated to guide and focus X-rays under grazing incidence condition at synchrotron and free electron laser beamlines. The best performing instruments of this kind are capable of absolute accuracy on the level of 30-50 nrad. However, the exact bandwidth of the measurements, determined at the higher spatial frequencies by the instrument’s spatial resolution, or more generally by the instrument’s modulation transfer function (MTF) is hard to determine. An MTF calibration method based on application of a test surface with a one-dimensional (1D) chirped height profile of constant amplitude was suggested in the past. In this work, we propose a new approach to designing the test surfaces with a 2D-chirped topography, specially optimized for MTF characterization of slope measuring instruments. The design of the developed MTF test samples based on the proposed linear chirped slope profiles (LCSPs) is free of the major drawback of the 1D chirped height profiles, where in the slope domain, the amplitude strongly increases with the local spatial frequency of the profile. We provide the details of fabrication of the LCSP samples. The results of first application of the developed test samples to measure the spatial resolution of the BESSY-NOM at different experimental arrangements are also presented and discussed.

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Section: Introductionmentioning

confidence: 99%

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Siewert

Zeschke

Arnold

et al. 2016

Review of Scientific Instruments

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“…Ion beam figuring (IBF) is an attractive technology for creating high-quality optics, particularly non-planar surfaces, for a variety of scientific applications employing a wide range of wavelengths including X-rays (Schindler et al, 2004;Fruit et al, 1999). The ion beam is rastered along the mirror with variable speed to preferentially remove material in a profile pre-determined by interferometry or profilometry.…”

Section: Next-generation Bimorph Mirrorsmentioning

confidence: 99%

Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines

Alcock

Nistea

Sutter

et al. 2015

J Synchrotron Radiat

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Piezo bimorph mirrors are versatile active optics used on many synchrotron beamlines. However, many bimorphs suffer from the 'junction effect': a periodic deformation of the optical surface which causes major aberrations to the reflected X-ray beam. This effect is linked to the construction of such mirrors, where piezo ceramics are glued directly below the thin optical substrate. In order to address this problem, a next-generation bimorph with piezos bonded to the side faces of a monolithic substrate was developed at Thales-SESO and optimized at Diamond Light Source. Using metrology feedback from the Diamond-NOM, the optical slope error was reduced to $ 0.5 mrad r.m.s. for a range of ellipses. To maximize usability, a novel holder was built to accommodate the substrate in any orientation. When replacing a firstgeneration bimorph on a synchrotron beamline, the new mirror significantly improved the size and shape of the reflected X-ray beam. Most importantly, there was no evidence of the junction effect even after eight months of continuous beamline usage. It is hoped that this new design will reinvigorate the use of active bimorph optics at synchrotron and free-electron laser facilities to manipulate and correct X-ray wavefronts.

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“…To demonstrate the current state of metrology, we will discuss the inspection of a superpolished focusing mirror pair for beamline P06 at PETRA III. Finishing technology like ion beam figuring (IBF) (Schindler et al, 2003;Thiess et al, 2010) and elastic emission machining (EEM) (Yamauchi et al, 2002) allow the substrate topography to be controlled on an atomic scale. Of course, this is only realistic if precise topography data are available.…”

Section: Introductionmentioning

confidence: 99%

On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology

et al. 2014

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To fully exploit the ultimate source properties of the next-generation light sources, such as free-electron lasers (FELs) and diffraction-limited storage rings (DLSRs), the quality requirements for gratings and reflective synchrotron optics, especially mirrors, have significantly increased. These coherencepreserving optical components for high-brightness sources will feature nanoscopic shape accuracies over macroscopic length scales up to 1000 mm. To enable high efficiency in terms of photon flux, such optics will be coated with application-tailored single or multilayer coatings. Advanced thin-film fabrication of today enables the synthesis of layers on the sub-nanometre precision level over a deposition length of up to 1500 mm. Specifically dedicated metrology instrumentation of comparable accuracy has been developed to characterize such optical elements. Second-generation slope-measuring profilers like the nanometre optical component measuring machine (NOM) at the BESSY-II Optics laboratory allow the inspection of up to 1500 mm-long reflective optical components with an accuracy better than 50 nrad r.m.s. Besides measuring the shape on top of the coated mirror, it is of particular interest to characterize the internal material properties of the mirror coating, which is the domain of X-rays. Layer thickness, density and interface roughness of single and multilayer coatings are investigated by means of X-ray reflectometry. In this publication recent achievements in the field of slope measuring metrology are shown and the characterization of different types of mirror coating demonstrated. Furthermore, upcoming challenges to the inspection of ultra-precise optical components designed to be used in future FEL and DLSR beamlines are discussed.

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Finishing procedure for high-performance synchrotron optics

Cited by 35 publications

References 0 publications

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Linear chirped slope profile for spatial calibration in slope measuring deflectometry

Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines

On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology

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