Multilayer ceramic substrate is mostly used in electronic packaging substrate because of its high strength, good insulation, excellent thermal conductivity and heat resistance, small thermal expansion coefficient and stable chemical properties. In this paper, solid works is used for 3D modeling, including bare chip, three-layer ceramic substrate, substrate through hole, copper-covered wiring. At the same time, ANSYS workbench software was used for finite element analysis and thermodynamic coupling simulation method was adopted, that is, temperature field data was imported into the structure field. The results showed that the deformation and stress were not large and the thermodynamic performance of the structure was stable under the cyclic test at -65℃-150℃ standard temperature.