Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

Li, Wang; Wang, Quandai; Hao, Xiaohong; Ding, Yucheng; Lu, Bingheng

doi:10.1007/s00170-010-2610-x

Cited by 27 publications

(3 citation statements)

References 12 publications

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“…For non-uniform electrochemical machining, the electric field was weak and there was no strong convective mass transfer effect. The transport of particles mainly depended on diffusion, so the polarization effect and concentration gradient could not be ignored [30,31]. Microscopic simulations, such as molecular dynamics, can describe the dissolution phenomenon at the atomic or electronic level; however, for tens of micrometer-scale pores, the current calculation level cannot meet the requirement.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Simulation of Non-Uniform Electrolytic Machining Based on Cellular Automata

Wei

Guo

2021

Metals

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Porous microstructure is a common surface morphology that is widely used in antifouling, drag reduction, adsorption, and other applications. In this paper, the lattice gas automata (LGA) method was used to simulate the non-uniform electrochemical machining of porous structure at the mesoscopic level. In a cellular space, the metal and the electrolyte were separated into orderly grids, the migration of corrosive particles was determined by an electric field, and the influences of the concentration gradient and corrosion products were considered. It was found that different pore morphologies were formed due to the competition between dissolution and diffusion. When the voltage was low, diffusion was sufficient, and no deposit was formed at the bottom of the pore. The pore grew faster along the depth and attained a cylindrical shape with a large depth-to-diameter ratio. As the voltage increased, the dissolution rates in all directions were the same; therefore, the pore became approximately spherical. When the voltage continued to increase, corrosion products were not discharged in time due to the rapid dissolution rate. Consequently, a sedimentary layer was formed at the bottom of the pore and hindered further dissolution. In turn, a disc-shaped pore with secondary pores was formed. The obtained simulation results were verified by experimental findings. This study revealed the causes of different morphologies of pores, which has certain guiding significance for non-uniform electrochemical machining.

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Section: Introductionmentioning

confidence: 99%

Modeling and Simulation of Non-Uniform Electrolytic Machining Based on Cellular Automata

Wei

Guo

2021

Metals

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“…In this method, lithography is utilized to fabricate the patterned samples on non-planner surfaces, which is costly process for fabrication of many patterned samples. Effects of structured electrode is investigated on surface patterning by TMEMM method mathematically and experimentally using 10 wt.% NaCl + 10 wt.% NaNO 3 electrolyte [3]. TMEMM is utilized to fabricate well-defined surface textures using 3 M sulfuric acid.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of array of micro circular impressions using different electrolytes by maskless electrochemical micromachining

Kunar

Rajkeerthi²,

Mandal

et al. 2020

Manufacturing Rev.

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Maskless electrochemical micromachining (EMM) is a prominent technique for producing the array of micro circular impressions. A method for producing the array of micro circular impressions on stainless steel workpiece applying maskless electrochemical micromachining process is presented. The experimental setup consists of maskless EMM cell, electrode holding devices, electrical connections of electrodes and constricted vertical cross flow electrolyte system to carry out the experimental investigation. One non-conductive masked patterned tool can produce more than twenty six textured samples with high quality. A mathematical model is developed to estimate theoretically the radial overcut and machining depth of the generated array of micro circular impressions by this process and corroborate the experimental results. This study provides an elementary perceptive about maskless EMM process based on the effects of EMM process variables i.e. pulse frequency and duty ratio on surface characteristics including overcut and machining depth for NaCl, NaNO3 and NaNO3 + NaCl electrolytes. From the experimental investigation, it is observed that the combined effect of lower duty ratio and higher frequency generates the best array of micro circular impressions using the mixed electrolyte of NaNO3 + NaCl with mean radial overcut of 23.31 µm and mean machining depth of 14.1 µm.

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“…Electrochemical micromachining (EMM) involves shaping materials on the micrometer to submicrometer scale by performing electrochemistry, conventionally through small openings in an insulating mask. , The benefits of EMM include exceptional control of etching rate and extent, as well as an ability to smoothly shape conductive materials of any hardness and domain size without incurring wear. − However, EMM has traditionally been limited to the removal of material, restricting the technique to precision milling. We have recently reported an EMM method designated RIPPLE (reactive interface patterning promoted by lithographic electrochemistry), which entails electrochemically patterning thin films of metal ( e.g.…”

mentioning

confidence: 99%

Mechanistic Study for Facile Electrochemical Patterning of Surfaces with Metal Oxides

et al. 2016

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Reactive interface patterning promoted by lithographic electrochemistry serves as a method for generating submicrometer scale structures. We use a binary-potential step on a metallic overlayer on silicon to fabricate radial patterns of cobalt oxide on the nanoscale. The mechanism for pattern formation has heretofore been ill-defined. The binary potential step allows the electrochemical boundary conditions to be controlled such that initial conditions for a scaling analysis are afforded. With the use of the scaling analysis, a mechanism for producing the observed pattern geometry is correlated to the sequence of electrochemical steps involved in the formation of the submicrometer structures. The patterning method is facile and adds to electrochemical micromachining techniques employing a silicon substrate.

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Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process

Cited by 27 publications

References 12 publications

Modeling and Simulation of Non-Uniform Electrolytic Machining Based on Cellular Automata

Modeling and Simulation of Non-Uniform Electrolytic Machining Based on Cellular Automata

Fabrication of array of micro circular impressions using different electrolytes by maskless electrochemical micromachining

Mechanistic Study for Facile Electrochemical Patterning of Surfaces with Metal Oxides

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