2017
DOI: 10.1134/s0036029517050123
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Finite element simulation of microindentation

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Cited by 16 publications
(7 citation statements)
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“…By performing FE simulations, the predictions based on the three-dimensional Berkovich model are in general accordance with those by using the two-dimensional equivalent model as found by Zhuk et al [32]. Essentially, the standard Berkovich indenter enables the consistency in terms of projected area by equivalent sharp indenters (e.g., conical, triangular pyramidal and square-based pyramidal indenters) for the indentations [33,34].…”
Section: Validation With No-film Modelsupporting
confidence: 77%
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“…By performing FE simulations, the predictions based on the three-dimensional Berkovich model are in general accordance with those by using the two-dimensional equivalent model as found by Zhuk et al [32]. Essentially, the standard Berkovich indenter enables the consistency in terms of projected area by equivalent sharp indenters (e.g., conical, triangular pyramidal and square-based pyramidal indenters) for the indentations [33,34].…”
Section: Validation With No-film Modelsupporting
confidence: 77%
“…A wide range of film materials is elastoplastic materials with the film thickness of 10-30 µm and the mechanical properties for Young's modulus of 10-50 GPa, yield strength of 60-300 MPa, hardening exponent of 0.1-0.5, and Poisson's ratio of 0.07. As shown in Figure 3, the solid line indicates the FE simulations and the spheres represent the experimental measurements [34], both of which are in good agreement, confirming the accuracy of the FE models when predicting the indentation response.…”
Section: Validation With No-film Modelsupporting
confidence: 66%
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“…The nodes on the left boundary were constrained in the X-direction and those at the bottom were restrained in the Y-direction. A rigid conical indenter with angles of 65.3 • and 70.3 • was established, in which the indenter with angles of 65.3 • and 70.3 • was equivalent to the Berkovich and Vickers indenter, respectively [34,41,42]. The indentation depth ranged from 0.01 mm to 1 mm with an interval of 0.01 mm.…”
Section: Finite Element Modelmentioning
confidence: 99%