First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry

Abstract

Microgrippers (MGs) are Micro Electro-Mechanical System (MEMS) devices able to manipulate cells and micrometric objects. In order to carry out their functional characterization, a comparison between two electrostatic rotary combdrives actuated prototypes with different geometries through an image analysis-based method is proposed. This study aims at evaluating and comparing the MGs displacement as a function of the supply voltage. The two investigated geometries are equipped with a single rotary comb-drive and a double rotary comb-drive actuation. MGs data have been collected through a trinocular optical microscope with a digital camera and processed by means of an algorithm implemented ad hoc in MATLAB. Based on the promising results obtained, further studies are going to be carried out by including other geometries and improving the experimental setup and implemented method.

First results on torque estimation by FEA and experimental analysis in a novel CSFH-based microgripper

“…Recent studies have shown that the total number of CSFHs is proportional to the energy necessary to deform the MG structure. As a result, MGs with only one CSFH pair and one pair of electrostatic rotary-comb drives [11][12] demonstrated a wider range of displacement considering the same applied voltage than MGs composed of a double four-bar linkage with multiple CSFHs [13][14].…”